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Analytic dual-wavelength phase decoupling method

A dual-wavelength, phase technology, applied in the field of analytical dual-wavelength phase decoupling, can solve the problems of reduced measurement speed, destruction of the original state of the sample, and increased complexity of the measurement system, so as to reduce complexity, avoid damage, and improve measurement speed. and the effect of measurement accuracy

Pending Publication Date: 2022-03-01
XIAN UNIV OF POSTS & TELECOMM
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Problems solved by technology

[0005] The purpose of the present invention is to solve the shortcomings of the existing phase decoupling method, either due to the increase in the complexity of the measurement system and the decrease in measurement speed due to the scanning technique, or the destruction of the original state of the sample due to the perfusion technique, and to provide a Analytical Two-Wavelength Phase Decoupling Method

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Embodiment Construction

[0093] The present invention will be further described below in conjunction with the accompanying drawings and exemplary embodiments.

[0094] refer to figure 1 , an analytical two-wavelength phase decoupling method based on a two-wavelength imaging system such as figure 1 As shown, the dual-wavelength imaging system includes a second light source 2, a second polarizer 4, an imaging objective lens, a CCD image sensor 10, and a first light source 1, a first polarizer 3, and a beam combiner arranged in sequence along the direction of the main optical path. , beam expander and wavefront shaping device 6 and beam splitter 7; the laser wavelengths of the first light source 1 and the second light source 2 are 550nm and 760nm respectively, and the laser light of the second light source 2 enters the rear edge of the beam combiner through the second polarizer 4 The main optical path exits; the outgoing light of the beam splitter 7 includes the first outgoing light that is vertically i...

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Abstract

The invention relates to coherent diffraction imaging, in particular to an analytic dual-wavelength phase decoupling method, which is used for overcoming the defects that the complexity of a measurement system is increased and the measurement speed is reduced due to a scanning technology or the original state of a sample is damaged due to a perfusion technology in the conventional phase decoupling method. According to the analytical dual-wavelength phase decoupling method, a scanning technology or a perfusion technology is not used any more, an imaging detector is used for recording intensity information of diffraction images under different wavelengths, and a high-order equation set is solved through a design algorithm, so that refractive index distribution and thickness distribution of a sample are obtained.

Description

technical field [0001] The invention relates to coherent diffraction imaging, in particular to an analytical dual-wavelength phase decoupling method. Background technique [0002] Coherent Diffraction Imaging (CDI) is a lens-free imaging method that records intensity information and reconstructs samples using phase coupling technology. It has developed rapidly in recent years and can be widely used in nanoscale biological material structure measurement, integrated circuit Non-destructive measurement of chip structure and surface topography and other fields (Science, 2015, 348, 530–535; Optica, 2015, 3, 827–835). [0003] In optics and measurement, the thickness distribution of an object reflects the boundary conditions of the light field, and the refractive index distribution determines the distribution of the medium; according to Maxwell's equations, the electromagnetic field can be uniquely determined only when the boundary conditions and permittivity distribution are dete...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J9/02
CPCG01J9/0246
Inventor 李拓张朵董军雷文秀
Owner XIAN UNIV OF POSTS & TELECOMM
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