Magnetic control pulling single crystal superconducting magnet coil and superconducting magnet device

Abstract

The invention discloses a magnetic control pulling single crystal superconducting magnet coil and a superconducting magnet device, the magnetic control pulling single crystal superconducting magnet coil comprises two coil groups, the two coil groups are oppositely arranged, each coil group is of an arc-shaped ring structure, each coil group is composed of at least two annular sub-coils, and the at least two sub-coils are sequentially arranged side by side. According to the embodiment of the invention, on the basis that the advantages of high magnetic field utilization rate of a saddle-shaped coil, small superconducting wire usage amount under the same magnetic field intensity requirement and the like are reserved, the winding difficulty of a single coil is reduced by adopting a multi-coil structure, and the production efficiency is improved. And meanwhile, the stress of the multi-coil structure is more reasonable under the action of strong electromagnetic force, and the risk of quenching of the coils in the operation process is relieved.

Description

technical field [0001] The invention relates to the technical field of semiconductor production equipment, in particular to a magnetically controlled single-crystal superconducting magnet coil and a superconducting magnet device. Background technique [0002] High-purity monocrystalline silicon is widely used in solar cells, integrated circuits, semiconductors, and other industries. It is one of the key materials for high-tech industries such as photovoltaic power generation and electronic information. It has an important strategic position in ensuring energy, information, and national security. [0003] According to the existing literature research, as of now, in the field of superconducting magnets for magnetron pulling single crystals, due to the regional and monopolistic nature of single crystal silicon processing and preparation, the current foreign research and development units are mainly Sumitomo, Toshiba (Toshiba) and Japan Superconducting Technology Corporation (Ja...

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Problems solved by technology

[0004] However, there is also a disadvantage for the saddle-shaped coil. Since the diameter of the magnet for magnetron single crystal is about 2m, and the coil is a saddle-shaped curved surface coil, the winding of the saddle-shaped coil is more difficult and time-consuming, which leads to large Large-scale production of saddle-shaped magnetron pull single crystal magnet production cycle and cost are limited by the influence of coil winding

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