Precise movement air floatation supporting device
A support device and precision motion technology, applied in the direction of air cushion bearings, bearings, shafts and bearings, can solve the problems that cannot meet the high-speed and high-precision motion requirements of the micro-motion stage of the lithography machine, the complex space occupancy of the air flotation system, the air Problems such as the high quality of the floating support frame structure
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[0030] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0031] It should be understood that the terms "front", "rear" and the like are used in the present invention to describe various information, but the information should not be limited to these terms, and these terms are only used to distinguish the same type of information from each other. For example, "before" information could also be called "after" information, and "after" information could also be called "before" information without departing from the scope of the present invention. Specifically, in the embodiment of the present invention, the installation direction of the guide rail is defined as the Y direction.
[0032] like Figure 1 to Figure 8 As shown, the emb...
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