Inchworm type piezoelectric push rod motor and hysteresis characteristic compensation method thereof

Abstract

The invention relates to an inchworm type piezoelectric push rod motor and a hysteresis characteristic compensation method thereof. The motor comprises a housing, a moving push rod, a driving unit, a PCB Hall sensor, a magnetic coding paster, a linear bearing and a driving controller. The driving unit comprises a piezoelectric ceramic stack and a ceramic sheet, the driving unit is fixed in the shell by using a bolt, and the moving push rod is mounted in center holes of the shell, the driving unit, the limiting unit and a shell end cover; and the linear bearing is installed between the shell and the moving push rod, and a round hole is formed in the corresponding position of the end cover of the shell, so that the push rod motor can always keep linear motion; and the novel inchworm-type piezoelectric push rod motor is based on the inchworm crawling principle in bionics, electric energy is converted into mechanical energy through the inverse piezoelectric effect, and the novel inchworm-type piezoelectric push rod motor has the advantages of being small in size, continuous in action, large in thrust, high in precision, easy to control and the like. The motor has more advantages in some large-stroke and high-resolution precision positioning fields.

Description

technical field [0001] The invention relates to the field of piezoelectric drive technology, and relates to an inchworm-type piezoelectric push rod motor and a hysteresis characteristic compensation method thereof. Background technique [0002] The requirements for precision, speed and stroke are also getting higher and higher. Among them, the driving device directly determines the speed, precision, stroke and efficiency of the entire system of the platform. [0003] The inchworm-type piezoelectric push rod motor is based on the crawling principle of the inchworm in bionics, and uses the inverse piezoelectric effect to convert electrical energy into mechanical energy. Inchworm-type piezoelectric push rod motors have the advantages of easy control, large thrust, and high precision. Therefore, in some fields of precision positioning with large strokes and high resolution, inchworm-type piezoelectric push rod motors have more advantages. However, the inchworm piezoelectric pu...

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Problems solved by technology

However, the inchworm piezoelectric push rod motor still has the following disadvantages: first, the centering guide structure cannot keep the motion axis in a straight line; second, the motor body does not have a stroke detection device, which is not convenient for closed-loop control; Due to the existence of nonlinear characteristics such as elastic deformation, inherent hysteresis and creep of piezoelectric materials between the insulating layers of the electric ceramic stack, the displacement of the inchworm motor and the driving voltage are not completely linear, which will reduce the positioning accuracy of the inchworm motor

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