Vacuum coating equipment for preparing piezoelectric ceramics

Abstract

The invention relates to the technical field of piezoelectric ceramics, in particular to vacuum coating equipment for preparing piezoelectric ceramics, which comprises a vacuum coating chamber; the inner side of the vacuum coating chamber is fixedly connected with a vacuum system; and the bottom of the vacuum coating chamber is fixedly connected with a rotary tool rotating stand. Through the arrangement of the rotary tool rotating stand and a magnetron sputtering system, the equipment adopts an integrated standard design, is stable in performance and convenient to produce and transport in batches, adopts a plurality of plane targets, and adopts a circular uniform layout design, so that the preparation uniformity of a piezoelectric ceramic film can be effectively improved in the film coating process; by adopting a rotary planar rectangular target, the target-substrate distance can be effectively reduced; the reactive sputtering deposition rate is improved; radio frequency magnetron sputtering coating is adopted; coating can be carried out under low air pressure; the vacuum coating equipment is green and pollution-free; meanwhile, the sputtering efficiency is also improved; the loading capacity is increased by adopting the design of the rotary tool rotating stand; and a uniform film layer can be efficiently prepared on a large-area continuous substrate.

Description

technical field [0001] The invention relates to the technical field of piezoelectric ceramics, in particular to a vacuum coating device for preparing piezoelectric ceramics. Background technique [0002] Piezoelectric ceramics is a new type of functional electronic material that can convert mechanical energy and electrical energy to each other. It has excellent piezoelectric, dielectric and photoelectric properties and stable electrical properties. It has a wide range of applications in industry, medicine, aerospace, biotechnology and other fields. Application market and broad development prospects. [0003] In China, most enterprises still use the outdated process of "screen printing silver paste and then high-temperature sintering" to prepare piezoelectric ceramics. Not only the quality of the film layer is poor, the production cost is high, the energy consumption is high, and the toxic gas emitted by the process is serious. Therefore, it is imperative to adopt the green ...

AI Technical Summary

Problems solved by technology

[0003] In China, most enterprises still use the outdated process of "screen printing silver paste and then high-temperature sintering" to prepare piezoelectric ceramics. Not only the quality of the film layer is poor, the production cost is high, the energy consumption is high, and the toxic gas emitted by the process is serious. Therefore, it is imperative to adopt green sputtering process to prepare piezoelectric ceramics, comprehensively improve product quality, and carry out mass production

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