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Spherical tip micro-nano thermocouple probe and preparation method thereof

A thermocouple, cutting-edge technology, applied in the direction of thermometers that are directly sensitive to heat/magnetic elements, measuring heat, using electrical devices, etc., can solve the problem of temperature measurement of droplets that are not suitable for shapes, low temperature sensitivity, and easily damaged rigidity and other problems, to achieve the effect of no thermal hysteresis, strong linear characteristics, high thermoelectric repeatability and stability

Active Publication Date: 2021-12-14
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, platinum-platinum-rhodium type thermocouples (S type) have been prepared by welding. This kind of thermocouple is extremely easy to damage and has insufficient rigidity. Its shape is not suitable for droplet temperature measurement; Thermocouple, the substrate of this kind of thermocouple is a glass tube, the heat capacity of the temperature measuring junction is larger than that of metal, and the temperature sensitivity is low; the thermocouple manufactured using silicon-based MEMS technology is prepared by ion beam etching. The temperature measuring junction is prepared by chemical etching, the temperature measuring junction is prepared by electron beam lithography, and the temperature measuring junction is prepared on the cantilever by combining photolithography and etching. These methods are relatively expensive

Method used

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  • Spherical tip micro-nano thermocouple probe and preparation method thereof
  • Spherical tip micro-nano thermocouple probe and preparation method thereof
  • Spherical tip micro-nano thermocouple probe and preparation method thereof

Examples

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Embodiment 1

[0030] Preparation of a spherical-tip micro-nano thermocouple probe for temperature measurement of water droplets, such as figure 1 shown, including the following steps:

[0031] (1) Put a tungsten rod with a diameter of 0.3mm and a length of 70mm cleaned on the surface into a 3mol / L sodium hydroxide solution, and use it as an anode for electrochemical corrosion to obtain a tip with a curvature radius of 2nm-5nm;

[0032] (2) Put the tipped tungsten probe into the tetrahydrofuran solution containing 100g / L polyurethane and slowly lift it up to obtain the tungsten probe wrapped by the back end; put the tip of the tungsten probe wrapped by the back end into the solution containing 100g / L polyurethane The tetrahydrofuran solution and lift it up slowly to get a tungsten probe completely wrapped at the front and back ends;

[0033] (3) The fully wrapped tungsten probe is used as one pole of the tip discharge, and the electrode is used as the other pole of the tip discharge, and a ...

Embodiment 2

[0041] A preparation of a spherical tip micro-nano thermocouple probe for temperature measurement of water droplets, comprising the steps of:

[0042] (1) Put a tungsten rod with a diameter of 0.3mm and a length of 70mm cleaned on the surface into a 3mol / L sodium hydroxide solution, and use it as an anode for electrochemical corrosion to obtain a tip with a curvature radius of 2nm-5nm;

[0043] (2) Put the tipped tungsten probe into the tetrahydrofuran solution containing 100g / L polyurethane and slowly lift it up to obtain the tungsten probe wrapped by the back end; put the tip of the tungsten probe wrapped by the back end into the solution containing 100g / L polyurethane The tetrahydrofuran solution and lift it up slowly to get a tungsten probe completely wrapped at the front and back ends;

[0044] (3) The fully wrapped tungsten probe is used as one electrode of the tip discharge, and the electrode is used as the other electrode of the tip discharge, and a voltage of 600V is ...

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Abstract

The invention discloses a spherical tip micro-nano thermocouple probe and a preparation method thereof. The thermocouple probe is mainly composed of a coaxial four-layer structure, a base is a tungsten probe with a spherical micro-nano tip, a dielectric layer is an insulating layer, an outer layer is made of platinum, and an outermost layer is a hydrophobic layer. During use, the spherical tip micro-nano thermocouple probes with different sizes are applied to a to-be-measured part, and the temperature of a spherical region with the surface area of 10-50 mu m < 2 > can be measured. Compared with a currently reported micro-nano thermocouple, the spherical tip micro-nano thermocouple probe has the advantages of good uniformity of preparation morphology, no thermal hysteresis, strong temperature-thermoelectric curve linear characteristic, high thermoelectric repeatability and stability, and good uniformity of Seebeck coefficient. While the morphology stability of the thermocouple probe is improved, the stability of the thermocouple probe in the process of measuring micro-nano scale temperature data is also improved.

Description

technical field [0001] The invention belongs to the field of micro-nano scale temperature sensors, in particular to a spherical tip micro-nano thermocouple probe and a preparation method thereof. Background technique [0002] Temperature changes can reflect energy changes, and a series of problems can be solved by measuring the temperature at the micro-nano scale. Droplet evaporation experiment is an important experimental method to obtain droplet information, and it is an important experimental method in the fields of fire and fire protection, explosion research, energy research and other fields. In the droplet suspension method experiment of the droplet evaporation experiment, it is difficult to measure the internal temperature of the droplet, and it is necessary to use a tiny temperature measurement structure to measure the temperature. Compared with the traditional macroscopic thermocouple, the micro-nano thermocouple has a small size ( The thickness is on the order of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K7/14
CPCG01K7/14
Inventor 顾宁安远毛伟陈峰
Owner SOUTHEAST UNIV
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