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Processing device

A technology for processing devices and processed objects, which is applied in the direction of instruments, electrical digital data processing, electrical components, etc., and can solve problems such as operational errors

Pending Publication Date: 2021-11-30
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, when the user of the processing device performs separate maintenance that has not been registered in the processing device in advance, the operator needs to perform the work of moving the movable unit alone, and thus operation errors are likely to occur.

Method used

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Embodiment Construction

[0022] Hereinafter, an embodiment of one aspect of the present invention will be described with reference to the drawings. First, a configuration example of the processing apparatus of the present embodiment will be described. figure 1 It is a perspective view showing the processing device 2 . The processing device 2 is a cutting device that performs cutting processing on the workpiece 11 . In addition, in figure 1 Here, the X-axis direction (machining feed direction, first horizontal direction, front-rear direction) and the Y-axis direction (index feed direction, second horizontal direction, left-right direction) are mutually perpendicular directions. In addition, the Z-axis direction (vertical direction, vertical direction, and height direction) is a direction perpendicular to the X-axis direction and the Y-axis direction.

[0023] The processing device 2 has a base 4 that supports or accommodates each component constituting the processing device 2 . A rectangular openin...

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PUM

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Abstract

The invention provides a processing device capable of automatically moving a movable unit to a desired position during maintenance. The processing device processes an object to be processed, and the processing device comprises: a movable unit capable of moving; an input unit; a display unit; and a control unit that controls the movable unit, the input unit, and the display unit, the control unit having a storage unit that stores the name of the maintenance and position information indicating the position of the movable unit when the maintenance is executed, the display unit displaying a selection key for selecting the maintenance, and when the selection key is selected, the control unit moves the movable unit to a position indicated by the position information, and can change the maintenance name and the position information stored in the storage unit by operating the input unit.

Description

technical field [0001] The present invention relates to a processing device for processing a workpiece. Background technique [0002] In the manufacturing process of device chips, IC (Integrated Circuit: Integrated Circuit), LSI (Large Scale Integration: Large Scale Integration Circuits) and other devices on the wafer. By dividing the wafer along planned dividing lines, a plurality of device chips each having a device can be obtained. Device chips are installed in various electronic devices such as mobile phones and personal computers. [0003] For dividing a wafer, for example, a cutting device is used. The cutting device includes: a holding table that holds a workpiece; and a cutting unit to which a ring-shaped cutting blade that cuts the workpiece is attached. By rotating the cutting blade attached to the cutting unit to cut into the workpiece, the workpiece is cut and divided. [0004] In addition, in recent years, along with miniaturization of electronic equipment,...

Claims

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Application Information

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IPC IPC(8): H01L21/67H01L21/78H01L21/268H01L21/304
CPCH01L21/67253H01L21/78H01L21/304H01L21/268G06F3/0489G06F3/04842G06F3/0488H01L21/67092
Inventor 小松淳
Owner DISCO CORP
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