Line spectrum confocal sensor system

Abstract

The invention discloses a line spectrum confocal sensor system, which comprises a casing, and a light source assembly, an optical fiber assembly, a coupling optical fiber assembly, a beam splitter prism assembly, a dispersion mirror assembly and a spectrometer assembly which are arranged in the casing, wherein the dispersion mirror assembly comprises a dispersion mirror light path and a dispersion mirror frame for fixing the dispersion mirror light path; the dispersion mirror light path is used for carrying out axial dispersion on the modulation detection light; the dispersion mirror light path comprises a first lens group and a second lens group which are sequentially arranged from the object side of the dispersion mirror to the image side of the dispersion mirror, the first lens group is used for controlling the object side to be telecentric and carrying out preliminary dispersion on the modulation detection light, and the second lens group is used for controlling the image side to be telecentric and carrying out further dispersion on the modulation detection light. The long focal length of the first lens group and the short focal length of the second lens group are matched for controlling the zoom ratio between the object space of the dispersion lens and the mirror space of the dispersion lens, and the dispersion objective lens is designed into a double-telecentric structure, so that the consistency of the brightness and the precision of a measurement light spot projected on a measured object can be effectively ensured.

Description

technical field [0001] The invention belongs to the field of optics, and in particular relates to a line spectrum confocal sensor system. Background technique [0002] With the rapid development of precision and ultra-precision manufacturing, the demand for high-precision detection is also increasing, so high-precision displacement sensors have also emerged as the times require. The precision of the ultra-precise displacement sensor can reach the micron level; although the traditional contact measurement also has high precision, it may scratch the surface of the measured object, and when the measured object is a weak rigidity or a light and soft material, Contact measurement will also cause elastic deformation and introduce measurement errors. In addition, the contact measurement speed is slow and it is difficult to realize automatic measurement. Based on the many shortcomings of contact measurement, non-contact displacement sensors have received greater attention. [0003]...

AI Technical Summary

Problems solved by technology

Usually, the above problems can be solved by increasing the number of optical channels, but simply increasing the number of optical channels cannot actually solve the contradiction between line length and resolution, because the increase in the number of optical channels (optical fibers) will introduce the above-mentioned non-central light The problem of channel consistency makes the design of the optical path too difficult. At the same time, there are also problems of high cost, excessive volume and weight.

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