Scanning electron microscope electron detector with high collection efficiency

Abstract

The invention provides a scanning electron microscope electron detector with high collection efficiency. The scanning electron microscope electron detector improves the collection efficiency of secondary electrons or backscattered electrons and can further improve a signal-to-noise ratio and resolution of images. The scanning electron microscope electron detector comprises a grid mesh; a Faraday cup; a scintillator; a light guide column; a photomultiplier tube; a high-voltage power supply; a current amplification circuit board; and a stainless steel shell, wherein an electronic signal input end of the Faraday cup is provided with a convex screen, an electronic signal output end of the Faraday cup is arranged towards the scintillator, a photon signal output end of the scintillator is arranged towards an input end of the light guide column, an output end of the light guide column is connected to a signal input end of the photomultiplier tube, a signal output end of the photomultiplier tube is connected with a signal input end of the current amplification circuit board, and the photomultiplier tube is connected with the high-voltage power supply; and the high-voltage power supply, the photomultiplier tube, the light guide column and the scintillator are coated in the stainless steel shell, and the Faraday cup is fixedly arranged at the input end of the front part of the stainless steel shell.

Description

technical field [0001] The invention relates to the technical field of material transfer, in particular to a scanning electron microscope electronic detector with high collection efficiency. Background technique [0002] Scanning electron microscope (SEM) is a microscopic morphology observation method between transmission electron microscope and optical microscope, which can directly use the material properties of the sample surface material for microscopic imaging. After the high-energy electron beam is incident on the sample, various information such as secondary electrons, backscattered electrons and X-rays will be excited on the surface of the sample. The information is detected by the corresponding detectors, and then transmitted to the display screen after signal processing and amplification to modulate the brightness of the display screen. The scanning electron microscope adopts this method of line-by-line scanning and point-by-point scanning to convert the different...

AI Technical Summary

Problems solved by technology

In the current mainstream scanning electron microscope, limited by the azimuth angle, the receiving efficiency of electronic signals is limited, and there are problems such as signal escape, which reduces the imaging efficiency and resolution of electronic detectors

In addition, the efficiency of receiving backscattered electrons by conventional E-T secondary electron detectors is only 2% to 4%, and the signal-to-noise ratio is very poor

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