A kind of electronic grade sulfuric acid preparation device and its preparation method
A preparation device and electronic-grade technology, which are applied to electronic-grade sulfuric acid preparation devices and their preparation fields, can solve the problems of poor waste gas and acid mist treatment effect and low efficiency, and achieve the effects of improving purification effect, fast efficiency and cost saving.
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[0040] Electronic grade sulfuric acid preparation device, such as Figure 1-8 As shown, including:
[0041] The pretreatment pool 7, the pretreatment pool is contained in the pretreatment, the strong oxidizing agent comprises potassium permanganate and potassium having a red chromate for reductive impurities in the oxidation of sulfuric acid.
[0042] The rectification column 8, the rectification tower interior temperature is 185-195 ° C, the pressure is 1.45-2.23 kPa, and the sulfate impurities generated by oxidation in the pretreatment cell, resulting in high purity sulfuric acid;
[0043] The absorption tower 9 is provided with an alkaline solution in the absorbing treatment tower for absorbing an acidic exhaust gas produced in the distillation column;
[0044] Filter 10, the filter is provided with a microporous filter membrane, which can be filled with fine solid particles in high purity sulfuric acid.
[0045] Further, the absorption treatment tower 9 includes a cylindrical h...
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