Subsurface defect detection device

Abstract

A subsurface defect detection device comprises: a light source assembly suitable for generating illumination light, the illumination light being divergent light, wherein the illumination light is coupled into a to-be-detected piece to form waveguide light, and the waveguide light is propagated in the to-be-detected piece in a guided wave mode; an imaging assembly which comprises an area array image sensor, wherein the area array image sensor is suitable for collecting the scattered waveguide light to obtain a defect image; and a processing assembly which is suitable for processing the defect image. The detection device can realize multi-angle detection so as to improve the imaging efficiency; moreover, an area array image sensor is adopted in the imaging assembly to obtain defect images, and the defect images are matched with divergent illumination light, so that the introduction of a scanning mode can be avoided, mechanical vibration interference is avoided, and the synchronous control difficulty is reduced.

Description

technical field [0001] The invention relates to the field of defect detection, in particular to a detection device for subsurface defects. Background technique [0002] Large-scale high-power laser devices such as the National Ignition Device of the United States, the megajoule laser device of France, and the Shenguang series devices of China usually require the use of a certain number of large-aperture optical components. Defects of optical components not only affect its long-term stability, coating quality and surface shape accuracy, but also directly reduce the laser damage threshold of the optical system, affecting its beam quality and service life. Subsurface imaging of optical components, especially for the characterization of subsurface defects, is particularly important for the effective detection of defects in optical components. [0003] The current characterization methods of subsurface defects can be divided into two categories: destructive detection methods and...

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Problems solved by technology

[0005] However, the existing detection devices often have the problems of strong mechanical vibration interference, high requirements for synchronous control stability, and low detection efficiency and speed.

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