Multi-chamber magnetic control multilayer optical coating equipment and method

Abstract

The invention discloses multi-chamber magnetic control multilayer optical coating equipment and method. The equipment comprises a workpiece in-out device, a pretreatment chamber, a workpiece in-out conversion chamber and a plurality of coating chambers which are connected in sequence, wherein the pretreatment chamber and the plurality of coating chambers are distributed at the periphery of the workpiece in-out conversion chamber; and a first vacuum gate valve mechanism is arranged between the workpiece in-out conversion chamber and the pretreatment chamber, a second vacuum gate valve mechanism is arranged between the workpiece in-out conversion chamber and each coating chamber, and a revolving door mechanism is arranged at the side, facing the workpiece in-out device, of the pretreatment chamber. The method comprises the following steps of conducting ion surface treatment on a workpiece on a work rest by the pretreatment chamber, then entering the workpiece in-out conversion chamber and lifting to the upper part, after one of the coating chambers finishes coating, sending out the work rest and the workpiece through the workpiece in-out conversion chamber, and descending a work rest to be coated and sending the work rest to be coated into the coating chamber. According to the equipment and the method, the vacuum degree uniformity between the coating chambers can be effectively improved, so that the consistency of the film layer performance of the coated workpiece is improved, and the coating quality of the workpiece is improved.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a multi-chamber magnetron multilayer optical coating device and a coating method. Background technique [0002] In the field of vacuum coating technology, traditional vacuum coating equipment mostly adopts the structure of a single furnace body or a linear multi-chamber series structure. [0003] In actual production, the vacuum coating equipment in the form of a single furnace structure has only one vacuum chamber, and the furnace body needs to be filled with atmosphere after each coating is completed, and the time for opening the door of the vacuum chamber is different each time, so it is easy to It affects the change of atmosphere in the vacuum chamber, and the degree of vacuum fluctuates greatly. In the end, the performance of the workpiece film after each furnace processing will be different, and the quality of the workpiece film will be different. [0004] In the li...

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Problems solved by technology

[0003] In actual production, since the vacuum coating equipment with a single furnace structure has only one vacuum chamber, the furnace body needs to be filled with atmosphere after each coating, and the opening time of each vacuum chamber door is different, so it is easy to It will affect the atmosphere changes in the vacuum chamber, and the vacuum degree will fluctuate greatly. In the end, the properties of the film layer of the workpiece after each furnace will be different, and the quality of the film layer of the workpiece will be different.

[0004] In the linear vacuum coating equipment with multiple chambers connected in series, each coating chamber usually adopts a rectangular structure, and the magnetron targets in the coating chamber can only be distributed on the two side walls of the coating chamber, which makes it difficult to achieve a uniform arrangement. Each coating chamber, therefore, the channels between adjacent coating chambers are generally relatively large. During the coating operation, the coating chamber needs to be inflated with working gas, and the arrangement of the gas baffle is quite difficult. The uniformity of the gas on the magnetron target is also difficult to control, and eventually it is easy to affect the coating quality of the workpiece

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