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Vacuum-generating apparatus and thin film processing apparatus having the same

A technology for generating device and vacuum pressure, applied in the field of film forming device and vacuum pressure generating device, can solve the problems of reduced uniformity of vacuum pressure, reduced quality of liquid crystal display panel film, etc.

Inactive Publication Date: 2006-06-21
SAMSUNG ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, when the vacuum pressure generating device is directly connected to the box, the pressure around the air discharge port is lower than the pressure in other places in the box, and as a result, the uniformity of the vacuum pressure in the box is significantly reduced.
[0008] When the vacuum pressure in the cabinet is not uniform, the quality of the film formed on the liquid crystal display panel will be significantly reduced.

Method used

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  • Vacuum-generating apparatus and thin film processing apparatus having the same
  • Vacuum-generating apparatus and thin film processing apparatus having the same
  • Vacuum-generating apparatus and thin film processing apparatus having the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] figure 1 is a schematic sectional view of a vacuum pressure generating device according to a first embodiment of the present invention, figure 2 is shown figure 1 An exploded perspective view of the exhaust plate of the medium vacuum pressure generating device.

[0032] refer to figure 1 and figure 2 , the vacuum generating device 400 according to this embodiment includes a vacuum generating unit 100 and a stabilization module 200 .

[0033] The vacuum generation unit 100 exhausts fluid in the process area 10 to form a vacuum pressure, for example, exhaust gas forms a vacuum pressure inside the process area 10 .

[0034] An example of the vacuum pressure generating unit 100 according to the present embodiment is a vacuum pump that exhausts gas in the process area 10 through a rotational motion within a motor. In addition, the vacuum generation unit 100 may use any device that can exhaust the gas inside the process area 10 .

[0035] The stabilization module 200 ...

Embodiment 2

[0047] image 3 is an exploded perspective view showing an exhaust plate of a vacuum pressure generating device according to a second embodiment of the present invention. The vacuum pressure generating device according to the second embodiment of the present invention has the same structure as the vacuum pressure generating device of the first embodiment described above except for the stabilizing module, so repeated description thereof is omitted, and for the same constituent elements Indicated by the same reference symbols and names.

[0048] refer to image 3 , the vacuum pressure generating device 400 according to this embodiment includes a vacuum pressure generating unit 100 and a stabilization module 200 .

[0049] The stabilization module 200 according to this embodiment is placed between the process area 10 and the vacuum pressure generating unit 100 to improve the uniformity of the vacuum pressure in the process area 10 . The stabilization module 200 has at least tw...

Embodiment 3

[0059] Figure 4 is an exploded perspective view showing an exhaust plate of a vacuum pressure generating device according to a third embodiment of the present invention. The vacuum pressure generating device according to the third embodiment of the present invention has the same structure as the vacuum generating device of the first embodiment except for the stabilizing module, so repeated description thereof is omitted, and the same components are used for the same components. Refer to symbols and names.

[0060] refer to Figure 4 , the vacuum pressure generating device 400 according to this embodiment includes a vacuum pressure generating unit 100 and a stabilization module 200 .

[0061] The stabilization module 200 according to this embodiment is placed between the process area 10 and the vacuum pressure generating unit 100 to improve the uniformity of the vacuum pressure in the process area 100 . The stabilization module 200 has fluid channels, for example, at least ...

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Abstract

The present invention provides a vacuum pressure generating device and a thin film forming device provided with the vacuum pressure generating device. The vacuum pressure generating device includes a vacuum pressure generating unit and a stabilization module. The vacuum pressure generating unit discharges fluid from the process area to form a vacuum in the process area. The stabilizing module is placed between the process area and the vacuum pressure generating unit. In order to improve the vacuum uniformity in the process area, it has at least two curved fluid passages through which the fluid passes. The fluid in the process area is discharged through the curved fluid channel to improve the vacuum uniformity in the process area.

Description

technical field [0001] The present invention relates to a vacuum pressure generating device and a thin film forming device provided with the vacuum pressure generating device. More specifically, the present invention relates to a vacuum pressure generating device that improves the uniformity of vacuum pressure formed in a process region, and a thin film forming device having the vacuum pressure generating device. Background technique [0002] Generally speaking, representative information processing devices for processing information are desktop computers, laptop computers, mobile phones, and PDAs (personal digital assistants). [0003] Most information processing devices include semiconductor chips that process information and display devices that change processed images into images. Recently, a liquid crystal display having a liquid crystal display panel having a thin thickness is widely used. [0004] A liquid crystal display panel includes thin films having gate lines,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/00C23C14/22G05B19/048H01L21/20H01L21/3065H01L21/31H01L21/311H01L21/3205H01L21/3213
CPCC23C16/4412F04D17/168F04D19/04F04D29/701G02F1/13
Inventor 宋仁虎赵宽英
Owner SAMSUNG ELECTRONICS CO LTD
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