A kind of multi-chamber magnetron multilayer optical coating equipment and coating method

Abstract

The invention discloses a multi-chamber magnetically controlled multi-layer optical coating equipment and method. The equipment includes a sequentially connected workpiece entry and exit device, a pretreatment chamber, a workpiece entry and exit conversion chamber, and a coating chamber. The pretreatment chamber and a plurality of coating chambers are distributed on the workpiece. There is a first vacuum gate valve mechanism between the workpiece entering and exiting the transition chamber and the pretreatment chamber, and a second vacuum gate valve mechanism is provided between the workpiece entering and exiting the transition chamber and each coating chamber, and the pretreatment chamber faces one side of the workpiece entering and exiting device. There is a revolving door mechanism on the side. The method is to perform ion surface treatment on the workpiece on the workpiece rack in the pretreatment room, and then enter the workpiece into and out of the conversion room and lift it to the upper part. After the coating is completed in one of the coating chambers, the workpiece rack and the workpiece are sent out through the workpiece in and out of the conversion room. The coated workpiece rack is lowered and sent into the coating chamber. The invention can effectively improve the uniformity of the vacuum degree among the various coating chambers, thereby improving the consistency of the film performance of the workpiece after coating, and improving the coating quality of the workpiece.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a multi-chamber magnetron multi-layer optical coating equipment and a coating method. Background technique [0002] In the field of vacuum coating technology, traditional vacuum coating equipment mostly adopts the structure of a single furnace or the structure of a linear multi-chamber in series. [0003] In actual production, since the vacuum coating equipment with a single furnace structure has only one vacuum chamber, the furnace body needs to be filled with atmosphere after each coating, and the opening time of each vacuum chamber door is different, so it is easy to It will affect the change of the atmosphere in the vacuum chamber, and the degree of vacuum will fluctuate greatly. Finally, the performance of the film layer of the workpiece after each furnace will be different, and the quality of the film layer of the workpiece will be different. [0004] In the linear ...

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Problems solved by technology

[0003] In actual production, since the vacuum coating equipment with a single furnace structure has only one vacuum chamber, the furnace body needs to be filled with atmosphere after each coating, and the opening time of each vacuum chamber door is different, so it is easy to It will affect the atmosphere changes in the vacuum chamber, and the vacuum degree will fluctuate greatly. In the end, the properties of the film layer of the workpiece after each furnace will be different, and the quality of the film layer of the workpiece will be different.

[0004] In the linear vacuum coating equipment with multiple chambers connected in series, each coating chamber usually adopts a rectangular structure, and the magnetron targets in the coating chamber can only be distributed on the two side walls of the coating chamber, which makes it difficult to achieve a uniform arrangement. Each coating chamber, therefore, the channels between adjacent coating chambers are generally relatively large. During the coating operation, the coating chamber needs to be inflated with working gas, and the arrangement of the gas baffle is quite difficult. The uniformity of the gas on the magnetron target is also difficult to control, and eventually it is easy to affect the coating quality of the workpiece

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