Gold interdigital micro electrochemical sensor and manufacturing method thereof

Abstract

The invention provides a gold interdigital micro electrochemical sensor and a manufacturing method thereof. The gold interdigital micro electrochemical sensor comprises a monocrystalline silicon substrate with a first set thickness, wherein a silicon dioxide layer with a second set thickness is arranged on the monocrystalline silicon substrate; and an interdigital electrode pair is arranged on the surface of the silicon dioxide layer, and the interdigital electrode pair comprises a nano titanium bonding layer of 10-20 nm and a nano gold sensing layer of 50-150 nm from inside to outside. According to the manufacturing method, a manufacturing method of integrated circuit micro-nano machining is adopted, silicon dioxide serves as an insulating substrate, titanium and gold serve as a bonding layer and a sensing layer respectively, and the sensor is prepared through electron beam evaporation and metal stripping processes. The gold interdigital micro electrochemical sensor which is complete in structure and morphology and sensitive in electrochemical property is obtained in batches under the treatment of multi-organic reagent washing and vacuum low-temperature drying process, and the gold interdigital micro electrochemical sensor is more stable in physicochemical property, sensitive in response and resistant to strong acid, strong alkali and a plurality of organic solutions.

Description

technical field [0001] The invention relates to the technical field of manufacturing chemically stable interdigital electrode sensors, in particular to a gold interdigital micro-electrochemical sensor and a manufacturing method thereof. Background technique [0002] As a microelectrode, the micro-interdigitated electrode has the advantages of simple structure, stable physical and chemical properties, fast detection signal response, rapid output, miniaturization and portability, and high signal-to-noise ratio. It is used in detection fields such as electrochemical sensing, bioelectrochemical sensing, and ion sensing. [0003] The traditional manufacturing process of miniature interdigitated electrodes mostly uses electroplating, screen printing and other processes for manufacturing and processing. Although these methods are simple and easy to implement, it is difficult to form a multi-interlayer electrode structure with controllable thickness, and it is difficult to achieve a...

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Problems solved by technology

[0004] The embodiment of the present invention provides a gold interdigitated micro-electrochemical sensor and its manufacturing method to solve the problem of unstable physical and chemical properties of micro-interdigitated electrodes produced by traditional manufacturing processes, poor environmental resistance, easy to be damaged by ultrasonic vibration and difficult to form Problems in multi-sandwich electrode structures with controllable thickness

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