Vacuum coating device with filtering and homogenizing nozzle

Abstract

The invention discloses a vacuum coating device with a filtering and homogenizing nozzle. The vacuum coating device is characterized by comprising a crucible, an induction heater is arranged on the outer side of the crucible, a flow distribution box body is connected to the top of the crucible through a steam pipeline, a horizontal partition plate is arranged in the flow distribution box body, a nozzle is connected to the top of the flow distribution box body, and a pressure regulating valve is arranged on the steam pipeline; the partition plate comprises a pressure dividing plate and a filterplate connected to the upper surface of the pressure dividing plate, and the pressure dividing plate and the filter plate are both of a porous structure; and the pressure dividing plate is of a sectional structure, and the position, right facing the steam pipeline, of the pressure dividing plate is provided with a D1 section, a D2 section, a D3 section, a D4 section and a D5 section, wherein theD2 section and the D3 section are correspondingly located on the two sides of the D1 section, the D4 section is located beside the D2 section, and the D5 section is located beside the D3 section. Whenhigh-temperature steam makes contact with a low-temperature steel plate, uniform coatings are formed on the surface of the steel plate.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, more specifically, to a vacuum coating device with a filtering and homogenizing nozzle. Background technique [0002] Physical vapor deposition (PVD) refers to the process of heating the metal to be plated under vacuum conditions to deposit it on the substrate in a gaseous state to form a coating. According to different heating methods, it is divided into electric heating (resistance or induction) and electron beam gun heating (EBPVD). Vacuum coating, as a surface modification and coating process, has been widely used in electronics, glass, plastics and other industries. The main advantages of vacuum coating technology lie in its environmental protection, good coating performance and the diversity of materials that can be plated. The key to applying vacuum coating technology to continuous strip steel lies in the aspects of continuous coating production, large area, high speed, and large-s...

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Problems solved by technology

[0011] The above-mentioned patents all relate to the specific form of nozzles in the coating process, but it does not show that the coatings performed by these nozzles can reach a uniform degree, for example Figure 7 and Figure 8 For example, since the holes are spaced round holes to form a uniform coating on the surface of the steel plate, and based on the high-pressure gas sprayed out along the small holes, radial circular spots are formed, so during the movement of the steel plate, this If the round spots and the round spots do not overlap, it is easy to form a strip-shaped coating; if the round spots and the round spots are too close, the overlapping parts between the round spots will easily form a thicker coating. The non-overlapping parts form a thinner coating, resulting in uneven coating between steel plates

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