Method and device for improving metal coverage of DFB laser

Abstract

The invention provides a method and device for improving metal coverage of a DFB laser. A clamp which can be placed in a coating machine and enables a coated sheet to be placed at a certain inclination angle is provided, the clamp is matched with a planetary turntable to perform electron beam evaporation, and thus the problem that cracks occur due to the influence of film material accumulation rate and direction in horizontal and vertical coating processes is solved. The device is simple in structure, solves the problem of the step coverage rate of the metal coating process on a non-planar structure, increases the production yield, and is suitable for popularization.

Description

technical field [0001] The invention relates to the technical field of metal coating, in particular to a method and a device for improving the metal coverage of a DFB laser. Background technique [0002] The optical communication network uses light as the carrier of signal transmission. Compared with the electrical communication network using copper cables as the transmission medium, the speed, capacity and anti-interference ability of information interconnection have been significantly improved, so it has been widely used. Semiconductor lasers are the main light source for optical communication networks. With the recent emergence and rapid commercialization of cloud computing, video transmission, Internet of Things, and 5G demands, the market demand for semiconductor lasers has increased dramatically. The preparation of semiconductor lasers represents the development direction of advanced micro-nano processing and device integration technology, and has been highly valued by...

AI Technical Summary

Problems solved by technology

However, the ridge waveguide is made of metal contact, and the surface and side steps of the ridge waveguide are poorly covered during coating. When coating with electron beam evaporation equipment, the metal step coverage is not good; some people use magnetron sputtering equipment for coating, which can achieve better step coverage. , but the cost is high

[0004] The most widely used metal coating equipment and the lowest cost are electron beam evaporation equipment, but poor metal coverage is one of its main shortcomings. At present, the main solution is to use a planetary turntable to achieve the purpose of improving step coverage, but the effect is not very ideal

[0005] The currently used method is a planetary turntable, that is, the revolution and rotation together can improve the step coverage, but in the corner area of ​​the top of the step, due to the influence of the deposition rate and direction of the film material during the horizontal and vertical coating process, there will be a gap, such as figure 1

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