Method and device for improving metal coverage of DFB laser

A DFB laser, metal technology, applied in metal material coating process, sputtering coating, vacuum evaporation coating and other directions, can solve the problems of high cost, unsatisfactory effect, poor metal coverage, etc.

Pending Publication Date: 2021-03-12
全磊光电股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the ridge waveguide is made of metal contact, and the surface and side steps of the ridge waveguide are poorly covered during coating. When coating with electron beam evaporation equipment, the metal step coverage is not good; some people use magnetron sputtering equipment for coating, which can achieve better step coverage. , but the cost is high
[0004] The most widely used metal coating equipment and the lowest cost are electron beam evaporation equipment, but poor metal coverage is one of its m...

Method used

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  • Method and device for improving metal coverage of DFB laser
  • Method and device for improving metal coverage of DFB laser
  • Method and device for improving metal coverage of DFB laser

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Embodiment

[0027] The present application provides a method for improving metal coverage of DFB lasers.

[0028] The specific measures are: provide a fixture that can be placed in the coating machine and place the coated film at a certain inclined angle. The fixture cooperates with the planetary turntable for electron beam evaporation to improve the horizontal and vertical coating process. And direction influence, and the gap problem that appears.

[0029] The present application also provides a device for improving metal coverage of a DFB laser.

[0030] The device includes a slide table 1 that can be placed in a coating machine, and a cover plate 2 (2mm) is provided on the slide table 1, and the slide table 1 and the cover plate 2 are detachably fastened and connected.

[0031] The middle part of the loading table 1 is provided with a film release groove 11 for placing the coated film, and the depth of the film release groove 11 is designed to be lower than the thickness of the coated...

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Abstract

The invention provides a method and device for improving metal coverage of a DFB laser. A clamp which can be placed in a coating machine and enables a coated sheet to be placed at a certain inclination angle is provided, the clamp is matched with a planetary turntable to perform electron beam evaporation, and thus the problem that cracks occur due to the influence of film material accumulation rate and direction in horizontal and vertical coating processes is solved. The device is simple in structure, solves the problem of the step coverage rate of the metal coating process on a non-planar structure, increases the production yield, and is suitable for popularization.

Description

technical field [0001] The invention relates to the technical field of metal coating, in particular to a method and a device for improving the metal coverage of a DFB laser. Background technique [0002] The optical communication network uses light as the carrier of signal transmission. Compared with the electrical communication network using copper cables as the transmission medium, the speed, capacity and anti-interference ability of information interconnection have been significantly improved, so it has been widely used. Semiconductor lasers are the main light source for optical communication networks. With the recent emergence and rapid commercialization of cloud computing, video transmission, Internet of Things, and 5G demands, the market demand for semiconductor lasers has increased dramatically. The preparation of semiconductor lasers represents the development direction of advanced micro-nano processing and device integration technology, and has been highly valued by...

Claims

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Application Information

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IPC IPC(8): C23C14/30C23C14/50C23C14/54
CPCC23C14/30C23C14/505C23C14/54
Inventor 张鹏张永单智发储开明姜伟
Owner 全磊光电股份有限公司
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