Wafer carrier automatic screwing device
A driving device and carrier technology, applied in the direction of manufacturing tools, metal processing, metal processing equipment, etc., can solve problems such as low work efficiency, material tray or internal wafer damage, time-consuming and laborious unloading screws, etc., to reduce pollution and ensure Accuracy, avoiding the effect of exceeding the stroke
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[0052] The present invention will be further described below in conjunction with specific embodiments. However, the purposes and purposes of these exemplary embodiments are only used to illustrate the present invention, and do not constitute any limitation to the actual protection scope of the present invention, nor do they limit the protection scope of the present invention.
[0053] like Figure 1 to Figure 4 As shown in the figure, this embodiment provides an automatic unscrewing device for a wafer carrier, including a frame 1, on which a double-speed chain conveyor line, a carrier positioning mechanism and an automatic unscrewing mechanism are provided. There are blocking cylinders 19, two sets of blocking cylinders 19 are arranged along the conveying direction of the double-speed chain conveyor line, and are respectively arranged at both ends of the carrier positioning mechanism, and the automatic screw-down mechanism is located above the carrier positioning mechanism.
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