A high-purity gas storage, adjustment and delivery cabinet

Abstract

The invention belongs to the technical field of chemical gas storage and control, and more specifically relates to a high-purity gas storage, adjustment and delivery cabinet. The use of detachable partition boards and pipe installation boards can make the gas cabinet very small, and it is very convenient to install, overhaul and replace gas components in different functional areas; the combination of heat preservation unit and sealing strip can ensure The gas and temperature environment of different unit areas are kept independent to ensure the fine control of the temperature of each functional area. In addition, the materials used will not produce particles, which ensures the cleanliness; high-purity nitrogen is used to maintain a slight positive pressure in each functional area , can prevent dust and water vapor in the air from entering the cabinet, and create a high-cleanliness, low-humidity environment for the gas components; using the exhaust port, the exhaust can be opened in time when a leak is detected without opening the cabinet door , Reduce environmental pollution and harm to operators as much as possible.

Description

technical field [0001] The invention belongs to the technical field of chemical gas storage and control, and more specifically relates to a high-purity gas storage, adjustment and delivery cabinet. Background technique [0002] In the field of optical fiber preform preparation or pan-semiconductor preparation, silicon tetrachloride, germanium tetrachloride, phosphorus oxychloride, oxygen, helium, Freon, chlorine and other high-purity gas raw materials are often used. In order to carry out the process accurately, these gases need to be filtered, pressure adjusted, flow controlled, valve controlled, etc., and flow control requires the gas to be within a constant temperature range. In addition, silicon tetrachloride, germanium tetrachloride, phosphorus oxychloride, etc. are in a liquid state at room temperature. Whether it is through carrier gas or direct evaporation, the buffer tank needs to be heated and kept warm. [0003] The existing high-purity gas storage, adjustment, a...

AI Technical Summary

Problems solved by technology

Since each compartment is fixed, it is extremely inconvenient to maintain, repair, and replace various pressure regulating valves, filters, hand valves, pneumatic valves, mass flow meters, and buffer tanks after the first installation; moreover The above-mentioned gas components and high-purity gases used need a high-clean and low-humidity environment; in addition, if silicon tetrachloride, germanium tetrachloride, phosphorus oxychloride, etc. leak, they will be extremely corrosive or extremely Strong toxicity, there is a great safety hazard

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