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Magnetron sputtering vacuum coating machine

A technology of vacuum coating machine and magnetron sputtering, which is applied in the direction of sputtering coating, vacuum evaporation coating, ion implantation coating, etc., can solve the problems such as the difficulty of cleaning the carriage, and achieve simple equipment cleaning, good effect, and low The effect of construction costs

Inactive Publication Date: 2020-12-25
黎方建
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  • Claims
  • Application Information

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Problems solved by technology

[0004] The invention provides a magnetron sputtering vacuum coating machine, which has the advantages of good workpiece coating effect, convenient sliding, and simple equipment cleaning, and solves the problems of improving the qualified rate of workpiece coating and cleaning the sliding frame

Method used

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  • Magnetron sputtering vacuum coating machine
  • Magnetron sputtering vacuum coating machine
  • Magnetron sputtering vacuum coating machine

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Embodiment Construction

[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0020] see Figure 1-5 , a magnetron sputtering vacuum coating machine, comprising a box body 1, a box cover 2 is fixedly installed on the upper surface of the box body 1, a vacuum tube 3 is fixedly set on the top of the box cover 2, and the top of the inner cavity of the box body 1 is fixedly installed There is a target material 4, and an electronic nozzle 5 is fixedly installed on one side of the upper part of the inner cavity of the box body 1. The outer su...

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Abstract

The invention relates to the technical field of coating equipment, and discloses a magnetron sputtering vacuum coating machine. The machine comprises a box body, wherein a box cover is fixedly mountedon the upper surface of the box body, and the top of the box cover is fixedly sleeved with a vacuumizing pipe. According to the magnetron sputtering vacuum coating machine, through cooperation of airsuction pipes and convex pipes, under the control effect of valves, air suction control can be conducted on the corresponding convex pipes, waste of air suction power consumption is effectively prevented, when a workpiece is replaced and which material frame needs to be pulled out, only the corresponding valve needs to be opened, suction force can correspond to the interiors of the convex pipes,the whole equipment does not need to be covered for air suction, it is guaranteed that the power consumption of air exhaust kinetic energy is minimum, the construction cost is reduced, carried air canbe exhausted in the workpiece pushing process after the workpiece is replaced, the situation that the workpiece cannot meet the qualified standard after coating due to influence on workpiece coatingcaused by the fact that dust carried in the air enters the box body is prevented, and the qualified rate of the workpiece is guaranteed.

Description

technical field [0001] The invention relates to the technical field of coating equipment, in particular to a magnetron sputtering vacuum coating machine. Background technique [0002] Vacuum coating machine mainly refers to a kind of coating in a relatively high vacuum. The substrate that needs to be coated is called the substrate, and the material to be coated is called the target. Both of them are in the vacuum chamber. The laser bombards the target, and the surface components are sputtered out in the form of atomic groups or ions, and finally deposited on the surface of the substrate, undergoing a film forming process, and finally form a thin film. [0003] During the use of the existing vacuum coating machine, in the patent application number 201810009708.1, it is solved that workpieces with different coating times cannot be mixed and coated, but after the coating of the workpiece in the vacuum chamber is completed, when replacing the next workpiece, it will be taken out...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/56
CPCC23C14/35C23C14/564
Inventor 黎方建
Owner 黎方建
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