Micro spectrum chip based on random shape unit

A miniature and spectral technology, applied in the field of spectral imaging, can solve the problems of limited broadband modulation function and limit the accuracy of spectral restoration, achieve the effects of enriching broadband modulation characteristics, realizing high-precision measurement, and improving the accuracy of spectral restoration

Pending Publication Date: 2020-12-01
TSINGHUA UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0003] An embodiment of the present invention provides a micro spectrum chip based on a random shape unit, which is used to solve the problem that the spectrum core in the prior art can realize a limited wide-spectrum modulation function, thereby limiting the accuracy of spectrum recovery, and it is difficult to further reduce the size of the device. The problem of size, to achieve higher precision, smaller size of the spectrum chip

Method used

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  • Micro spectrum chip based on random shape unit
  • Micro spectrum chip based on random shape unit
  • Micro spectrum chip based on random shape unit

Examples

Experimental program
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Effect test

Embodiment 1

[0074] Such as Figure 13 As shown, the spectrum chip includes a light modulation layer 1 , a CIS wafer 2 and a signal processing circuit 3 . The light modulation layer 1 is directly prepared on the CIS wafer, and its lateral structure adopts the above-mentioned scheme 1, and the specific structure is as follows Figure 14 , Figure 15 As shown, the light modulation layer 1 includes multiple repeating micro-nano structural units, and each micro-nano structural unit is internally divided into 9 groups of different micro-nano structure arrays 110-118, and each group of two-dimensional gratings is periodically arranged in the same shape, The shape is an irregular shape generated randomly, and the period size of each group of micro-nano structure arrays is 20nm~50μm; each group of micro-nano structure arrays has different broad-spectrum modulation effects on incident light, and different micro-nano structure units are located at corresponding positions. The micro-nano structure ...

Embodiment 2

[0078] Such as Figure 17 As shown, the main difference between Example 2 and Example 1 lies in the lateral structure. Several micro-nano structural units constituting the light modulation layer 1 have C4 symmetry, that is, after the structure is rotated by 90°, 180° or 270°, it is different from the original structure. The structure coincides when rotated, which can make the structure have polarization-independent properties.

Embodiment 3

[0080] Such as Figure 18 As shown, the main difference from Example 1 lies in the vertical structure of the micro spectrum chip. A layer of light-transmitting medium layer 4 is added between the light modulation layer 1 and the CIS wafer 2, and the thickness of the light-transmitting medium layer 4 is 50nm~ 2 μm, the material can be silicon dioxide. If it is a process scheme of direct deposition growth, the light-transmitting medium layer can be prepared on the CIS wafer by chemical vapor deposition, sputtering, spin coating, etc., and then the light modulation layer structure can be deposited and etched on top of it. . If it is a transfer process scheme, the micro-nano structure can be prepared on the silicon dioxide first, and then the two parts are transferred to the CIS wafer as a whole. The preparation of the spectrum chip can be completed by one-time tape-out of the CMOS process, which is beneficial to reduce the failure rate of the device, improve the yield rate of t...

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Abstract

The embodiment of the invention provides a micro spectrum chip based on a random shape unit, which comprises a CIS wafer and a light modulation layer. The light modulation layer comprises a pluralityof micro-nano structure units arranged on the surface of a photosensitive area of the CIS wafer, each micro-nano structure unit comprises a plurality of micro-nano structure arrays, and in each micro-nano structure unit, different micro-nano structure arrays are two-dimensional gratings composed of random-shaped internal units. In each micro-nano structure unit in the scheme, different micro-nanostructure arrays have different internal unit shapes, each group of micro-nano structure arrays have different modulation effects on light with different wavelengths, the freedom degree of 'the shape'is fully utilized, rich modulation effects on incident light are obtained, the spectrum recovery precision is improved, and the unit size can be reduced; a two-dimensional grating structure based onan internal unit in a random shape is utilized, the wide-spectrum modulation characteristic rich to incident light is achieved, and high-precision measurement on the incident light frequency spectrumis achieved.

Description

technical field [0001] The invention relates to the technical field of spectrum imaging, in particular to a micro spectrum chip based on random shape units. Background technique [0002] Existing spectrometers need to separate different wavelengths of incident light in space through spectroscopic elements, and then detect them. However, precision spectroscopic elements are usually large in size, which limits the miniaturization of spectrometers. In addition, the incident light is modulated by an array of micro-nano structures with regular and repeating shape units, and the spectral information of the incident light can be recovered from the detector response with the help of algorithms; however, this scheme uses regular shape units, by changing the period, duty Ratio and other parameters, the wide-spectrum modulation function that can be realized is limited, thus limiting the accuracy of spectral recovery, and it is difficult to further reduce the size of the device. Theref...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/146
CPCH01L27/1462H01L27/14625
Inventor 崔开宇杨家伟黄翊东张巍冯雪刘仿
Owner TSINGHUA UNIV
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