A Fourier transform spectrometer on a silicon substrate with high resolution and large measurement range

Abstract

The invention discloses a Fourier transform spectrometer on a silicon substrate with high resolution and large measurement range. The light source to be tested is connected to the input waveguide; the output end of the input waveguide is connected to the input end of the 3dB power beam splitter; The upper and lower interference arms; the output ends of the two multi-stage optical path selectors are respectively connected to the low-loss Euler helix covered with metal electrodes of a specific length; the other ends of the two low-loss helix waveguides are simultaneously input to the optical power combiner The input end; the output end of the optical power beam combiner is connected with the input end of the optical power detector to monitor the intensity of the output optical signal. The invention combines the low-loss waveguide and the quasi-continuous thermal adjustment waveguide with the traditional on-chip Fourier spectrometer for the first time, which can be used in biological sensing, spectral measurement and other systems, and has the advantages of high resolution, large measurement range, high luminous flux, and compact structure.

Description

technical field [0001] The invention relates to an on-chip Fourier transform spectrometer, in particular to a high-performance Fourier transform spectrometer based on quasi-continuous adjustment for realizing high resolution and large measurement range. Background technique [0002] A spectrometer is a scientific instrument that decomposes the complex spectrum to be measured into spectral lines. Traditional spectrometers have disadvantages such as large volume, complex structure, and high price. With the continuous development of modern biology, medicine, aerospace, and environmental detection technologies, there is an increasing demand for micro-spectrometers that can monitor and sense the spectra of organisms and materials in real time. [0003] In terms of the performance requirements of the on-chip spectrometer, on the one hand, it has high requirements for high spectral resolution, which can meet the needs of modern sophisticated biological and environmental monitoring;...

AI Technical Summary

Problems solved by technology

The solution using a dispersive spectrometer: Although this solution can achieve higher resolution, it is difficult to achieve high luminous flux due to the limitation of its physical mechanism

For the currently commonly used on-chip Fourier spectrometers, such as spatial extrapolation spectroscopy (SHS), although extremely high resolution can be achieved, the requirements of the Mach-Zehnder array make its size huge, and it is difficult to achieve large measurements. scope

For the newly proposed digital Fourier transform spectrometer, although higher resolution and larger bandwidth can be achieved, when its performance is to be further improved, it will face the problem of crosstalk caused by the increase in the number of optical switches and the increase in the length of the waveguide. The high waveguide loss problem of

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