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Pressure sensor, preparation method and application thereof and intracranial pressure detection equipment

A technology of pressure sensors and elastic polymers, applied in the field of sensors, can solve the problems of poor flexibility, low sensitivity, hard texture, etc., and achieve the effects of flexible sensitivity, reduced cross-sectional area, and increased length

Active Publication Date: 2020-11-27
SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For a long time, solid metal materials are usually used as sensor materials, but solid metal materials often have disadvantages such as hard texture, poor flexibility, and low sensitivity.

Method used

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  • Pressure sensor, preparation method and application thereof and intracranial pressure detection equipment
  • Pressure sensor, preparation method and application thereof and intracranial pressure detection equipment
  • Pressure sensor, preparation method and application thereof and intracranial pressure detection equipment

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preparation example Construction

[0053] see figure 2 , the preparation method of the pressure sensor of an embodiment is a kind of preparation method of the above-mentioned pressure sensor, comprising the following steps:

[0054] Step S110: providing a template, the template has a serpentine channel.

[0055] Specifically, in one embodiment, the width of the serpentine channel is 1 μm˜1 cm, the height of the serpentine channel is 1 μm˜1 cm, and the length of the serpentine channel is 500 μm˜3 m.

[0056] Further, the width of the serpentine channel is 300 μm˜2000 μm, the height of the serpentine channel is 50 μm˜2000 μm, and the length of the serpentine channel is 200 mm˜2000 mm.

[0057] In this paper, the size of the serpentine channel can be adjusted according to actual needs.

[0058] Specifically, before step S110, a step of preparing a template is also included. In one of the embodiments, the step of preparing the template comprises:

[0059] The master template is printed by 3D printing, and the ...

Embodiment 1

[0098] The preparation process of the pressure sensor of embodiment 1 is specifically as follows:

[0099] (1) Use Soliworks software to design the structural graphics of the serpentine channel. The height (h) of the serpentine channel is 100 μm, the width is 500 μm, and the total length (L) is 455 mm; then the graphic file is converted into stl format, and then input to 3D printer (model EnvisionTEC), which converts graphics processing into graphics files that can be used by 3D printers; uses yellow resin material (HTM140 V2 (3D pixel is 25 μm ~ 50 μm)) to 3D print out the master template; weigh the appropriate weight of the precursor solution (model Dow Coming Sylgard 184, the precursor solution is composed of monomer and curing agent with a mass ratio of 10:1); pour the fully stirred precursor solution onto the 3D printed master template with a thickness of about 5mm, and put it in a vacuum drying dish Remove air bubbles for 15 minutes, then move to an oven at 80°C and ba...

Embodiment 2

[0105] The preparation process of the pressure sensor of embodiment 2 is specifically as follows:

[0106] (1) A serpentine channel is formed on the PDMS substrate by ion etching. The height (h) of the serpentine channel is 50 μm, the width is 300 μm, and the total length (L) is 200 mm to obtain a PDMS template.

[0107] (2) Seal the PDMS template with adhesive tape, and then open a small opening at one end of the serpentine channel to make it into a semi-sealed state. Use a syringe to inhale a certain amount of liquid metal gallium indium alloy, and fill the serpentine channel with liquid metal gallium indium alloy from one end with a small opening. Put the PDMS template filled with liquid metal gallium indium alloy into the refrigerator, and let it stand at -80°C for 20 minutes to make the liquid metal solidify.

[0108] (3) After the liquid gallium-indium alloy is solidified, take out the PDMS mold, tear off the sealing tape, and peel off the solid metal gallium-indium all...

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Abstract

The invention relates to a pressure sensor, a preparation method and application thereof and intracranial detection equipment. The pressure sensor comprises an elastic polymer layer and a liquid metalfilled in the elastic polymer layer, a serpentine channel is arranged in the elastic polymer layer, and the liquid metal is filled in the serpentine channel. The pressure sensor is flexible and highin sensitivity.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a flexible pressure sensor, its preparation method, application and intracranial pressure detection equipment. Background technique [0002] A pressure sensor is a device or device that can sense pressure signals and convert the pressure signals into output electrical signals according to certain rules. Traditional pressure sensors are mainly mechanical structural devices, which indicate pressure by the deformation of elastic elements, but this structure is large in size and heavy in weight, and cannot provide electrical signal output. Therefore, in recent years, relevant experts are devoting themselves to the research and development of pressure sensors with better flexibility, stability and reliability. The research and development of flexible pressure sensors can be based on a variety of working principles, including piezoresistive, capacitive, piezoelectric, etc., and there are also a...

Claims

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Application Information

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IPC IPC(8): A61B5/03
CPCA61B5/031
Inventor 朴宰源张宝月黄子懿金絃洙
Owner SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
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