Carbon/carbon crucible with silicon carbide/silicon coating and preparation method thereof

A technology of silicon carbide coating and silicon coating, applied in chemical instruments and methods, self-melting liquid pulling method, crystal growth, etc., can solve the problem of complex process, high production cost, pyrolytic carbon coating or silicon carbide Solve problems such as low coating deposition rate, achieve the effects of reducing porosity, increasing service life, and improving oxidation resistance

Active Publication Date: 2020-10-30
XIAN CHAOMA SCI TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the deposition rate of pyrolytic carbon coating or silicon carbide coating prepared by chemical vapor deposition is low, the process is complicated, and the production cost is high.

Method used

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  • Carbon/carbon crucible with silicon carbide/silicon coating and preparation method thereof
  • Carbon/carbon crucible with silicon carbide/silicon coating and preparation method thereof
  • Carbon/carbon crucible with silicon carbide/silicon coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] Such as figure 1 As shown, the carbon / carbon crucible with silicon carbide / silicon coating in this embodiment includes a carbon / carbon composite material crucible 1 and a silicon carbide / silicon coating 2 covering the inner surface of the carbon / carbon composite material crucible 1. The silicon carbide / silicon coating 2 consists of a silicon carbide coating and a silicon coating covering the silicon carbide coating, the thickness of the silicon carbide coating is 10 μm, and the thickness of the silicon coating is 100 μm.

[0031] The preparation method of the carbon / carbon crucible with silicon carbide / silicon coating of the present embodiment comprises the following steps:

[0032] Step 1. According to the shape and performance requirements of the target product, use carbon fiber, carbon cloth and net tire to make a density of 0.20g / cm by conventional methods 3 carbon fiber prefabricated body, and then densified to a density of 1.30g / cm 3 ; The concrete process of de...

Embodiment 2

[0040] The carbon / carbon crucible with silicon carbide / silicon coating in this embodiment includes a carbon / carbon composite crucible 1 and a silicon carbide / silicon coating 2 covering the inner surface of the carbon / carbon composite crucible 1, the silicon carbide / The silicon coating 2 is composed of a silicon carbide coating and a silicon coating covering the silicon carbide coating, the thickness of the silicon carbide coating is 30 μm, and the thickness of the silicon coating is 300 μm.

[0041] The preparation method of the carbon / carbon crucible with silicon carbide / silicon coating of the present embodiment comprises the following steps:

[0042] Step 1. According to the shape and performance requirements of the target product, use carbon fiber, carbon cloth and net tire to make a density of 0.30g / cm by conventional methods 3 carbon fiber prefabricated body, and then densified to a density of 1.45g / cm 3 ; The concrete process of described densification is:

[0043] St...

Embodiment 3

[0050] The carbon / carbon crucible with silicon carbide / silicon coating in this embodiment includes a carbon / carbon composite crucible 1 and a silicon carbide / silicon coating 2 covering the inner surface of the carbon / carbon composite crucible 1, the silicon carbide / The silicon coating 2 is composed of a silicon carbide coating and a silicon coating covering the silicon carbide coating, the thickness of the silicon carbide coating is 50 μm, and the thickness of the silicon coating is 500 μm.

[0051] The preparation method of the carbon / carbon crucible with silicon carbide / silicon coating of the present embodiment comprises the following steps:

[0052] Step 1. According to the shape and performance requirements of the target product, use conventional methods to make a density of 0.50g / cm by using carbon fiber, carbon cloth and mesh tires 3 carbon fiber prefabricated body, and then densified to a density of 1.65g / cm 3 ; The concrete process of described densification is:

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Abstract

The invention discloses a carbon / carbon crucible with a silicon carbide / silicon coating. The carbon / carbon crucible comprises a carbon / carbon composite crucible and the silicon carbide / silicon coatingcovering the inner surface of the carbon / carbon composite body, wherein the silicon carbide / silicon coating consists of a silicon carbide coating and a silicon coating covering the silicon carbide coating. The invention also discloses a preparation method of the carbon / carbon crucible with the silicon carbide / silicon coating. The method comprises the following steps: 1, densifying a carbon fiberpreform; 2, conducting processing to obtain the carbon / carbon composite crucible; and 3, conducting spraying on the inner surface of a carbon / carbon crucible matrix by adopting a plasma spraying method to obtain the carbon / carbon crucible with the silicon carbide / silicon coating. By arranging the silicon carbide / silicon coating, corrosion of silicon-containing steam to the inner surface of the crucible is avoided, and the service life of the crucible is prolonged; and by adopting the plasma spraying method, the bonding strength of the silicon carbide / silicon coating and the carbon / carbon crucible matrix is improved, and the surface quality of the carbon / carbon crucible with the silicon carbide / silicon coating is improved.

Description

technical field [0001] The invention belongs to the technical field of thermal field components for single crystal silicon drawing furnaces, and in particular relates to a carbon / carbon crucible with a silicon carbide / silicon coating and a preparation method thereof. Background technique [0002] With the application of monocrystalline silicon in the solar photovoltaic industry more and more widely, carbon / carbon composite materials have also been rapidly developed as important thermal field materials for Czochralski monocrystalline silicon furnaces. However, in the process of Czochralski single crystal Melting may produce silicon vapor and splash of molten silicon, resulting in silicification of carbon / carbon thermal field materials, seriously affecting the mechanical properties and service life of carbon / carbon components. Therefore, the anti-oxidation protection and anti-silicidation corrosion protection of the carbon / carbon thermal field materials in the Czochralski sing...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/83C04B35/84C04B41/89C30B15/10C30B29/06
CPCC04B35/83C04B41/89C04B41/009C04B41/52C30B15/10C30B29/06C04B2235/77C04B2235/608C04B2235/46C04B2235/483C04B2235/96C04B41/5059C04B41/456C04B41/4545C04B41/0072C04B41/5096
Inventor 张永辉赵杉程皓白鸽康媛媛康文杰
Owner XIAN CHAOMA SCI TECH
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