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Method for producing high-temperature superconducting strip by multi-source ion injection source ex-situ deposition

A technology of high-temperature superconducting strips and spray sources, which is applied in the usage of superconducting elements, superconducting devices, superconducting/high-conducting conductors, etc., which can solve the problem of inability to accurately control the composition of the film, difficulty in controlling the uniformity of the coating, and process equipment. High cost and other issues, to achieve the effect of improving coating efficiency, improving production efficiency, and fast growth rate

Active Publication Date: 2020-10-16
SHANGHAI SUPERCONDUCTOR TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The Chinese invention patent with the notification number CN110904411A discloses a method for manufacturing a superconducting cable conductor film, which uses a pulsed laser deposition molecular beam epitaxy film preparation system to produce a substrate film, but the deposition rate of the pulsed laser method is generally about 50nm / s. Its deposition rate is slow and the cost of process equipment is high
The reactive co-evaporation deposition method cannot accurately control the composition of the film and it is difficult to control the uniformity of the coating.

Method used

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  • Method for producing high-temperature superconducting strip by multi-source ion injection source ex-situ deposition
  • Method for producing high-temperature superconducting strip by multi-source ion injection source ex-situ deposition
  • Method for producing high-temperature superconducting strip by multi-source ion injection source ex-situ deposition

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Embodiment 1

[0033]A method for producing high-temperature superconducting strips by ex-situ deposition of multi-source ion injection sources, taking the preparation process of GdBCO second-generation high-temperature superconducting strips as an example, includes the following steps:

[0034] A. In the deposition chamber, the buffer layer strip with biaxial texture passes near the target. The number of ion guns in the multi-source ion injection is 6, and the target is bombarded by 6 ion injection sources to form a plasma. Plume, so that a mixture of metal oxides is deposited on the buffer strip to form a precursor film;

[0035] Wherein, the buffer layer strip is a nickel-based or copper-based alloy, and the present embodiment selects a nickel-based alloy; the surface of the buffer layer strip is plated with CeO 2 / LaMnO 3 / MgO / Y 2 o 3 ; The target is Gd 2 o 3 , Ba 2 CO 3 , a homogeneously mixed target of three metal oxides of CuO, in which the atomic ratio of Gd, Ba, and Cu is 1:2...

Embodiment 2

[0039] A method for producing high-temperature superconducting strips by ex-situ deposition of multi-source ion injection sources, taking the preparation process of YGdBCO second-generation high-temperature superconducting strips as an example, includes the following steps:

[0040] A. In the deposition chamber, the buffer layer strip with biaxial texture passes near the target. The number of ion guns in the multi-source ion injection is 6, and the target is bombarded by 6 ion injection sources to form a plasma. Plume, so that a mixture of metal oxides is deposited on the buffer strip to form a precursor film;

[0041] Wherein the buffer layer strip is nickel-based or copper-based alloy, the present embodiment selects copper-based alloy; the surface of the buffer layer strip is plated with CeO 2 / LaMnO 3 / MgO / Y 2 o 3 ; target is Y 2 o 3 , Gd 2 o 3 , Ba 2 CO 3 A homogeneous mixture target composed of four metal oxides of CuO and CuO, wherein the atomic ratio of Y, Gd, ...

Embodiment 3

[0046] A method for producing high-temperature superconducting tapes by ex-situ deposition of a multi-source ion injection source to contain BaZrO 3 The preparation process of doped GdBaCuO second-generation high-temperature superconducting tape is taken as an example, including the following steps:

[0047] A. In the deposition chamber, the buffer layer strip with biaxial texture passes near the target. The number of ion guns in the multi-source ion injection is 8, and the target is bombarded by 8 ion injection sources to form a plasma. Plume, so that a mixture of metal oxides is deposited on the buffer strip to form a precursor film;

[0048] Wherein, the buffer layer strip is a nickel-based or copper-based alloy, and the present embodiment selects a copper-based alloy; the surface of the buffer layer strip is plated with CeO 2 / LaMnO 3 / MgO / Y 2 o 3 ; The target is Gd 2 o 3 , Ba 2 CO 3 , CuO and BaZrO 3 A homogeneously mixed target composed of four metal oxides. Am...

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Abstract

The invention discloses a method for producing a high-temperature superconducting strip through multi-source ion injection source ex-situ deposition. The method belongs to the technical field of preparation processes of superconducting tapes, and comprises the following steps that a target material is bombarded by using multi-source ion injection, and a buffer layer strip with a biaxial texture passes through the surrounding of the target material, so that a mixture of metal oxides is deposited on a buffer layer to form a precursor film; the precursor film firstly passes through a low-oxygen partial pressure environment and then passes through a high-oxygen partial pressure environment to form a superconducting film with a tetragonal phase; after the tetragonal superconducting film absorbsoxygen, tetragonal phase-to-orthogonal superconducting phase conversion is completed, and the superconducting strip with certain current-carrying performance is formed. According to the invention, the superconducting thin film is realized through the technical scheme of multi-source ion gun spray deposition. Through a differential oxygen partial pressure technology, processes of rapid generationof a superconducting phase, heat treatment and the like are realized. The technology has the advantages of high coating efficiency, high film growth rate, capability of accurately controlling film components and uniformity, low cost and the like, and is suitable for industrial large-scale production.

Description

technical field [0001] The invention belongs to the technical field of preparation technology of superconducting strips, and in particular relates to a method for producing high-temperature superconducting strips by ex-situ deposition of multi-source ion injection sources, in particular to a method for producing non-in-situ deposition of multi-source ion injection sources. The process method of the second-generation high-temperature superconducting tape. Background technique [0002] The phenomenon of superconductivity was discovered for the first time in 1911. In the past 100 years, through the continuous efforts of countless scientists, the types of superconducting materials have been continuously enriched. Especially in the past two decades, the development of superconducting materials has made great progress. Widely used in medical nuclear magnetic, nuclear fusion, superconducting cables and superconducting current limiters and other fields. The second-generation high-...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01B13/00H01B12/00
CPCH01B12/00H01B13/0016H01B13/0026Y02E40/60
Inventor 赵跃师江涛程春生姜广宇朱佳敏金之俭
Owner SHANGHAI SUPERCONDUCTOR TECH CO LTD
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