A kind of crystal implantation doping preparation method of nano-diamond transition metal color center
A nano-diamond and transition metal technology, applied in metal material coating process, coating, gaseous chemical plating, etc., can solve the problem of difficult introduction of transition metal elements, etc., to increase nucleation density, promote formation, and facilitate luminescence stable effect
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[0035] The present invention takes the crystal implantation doping preparation method of nano-diamond titanium color center as an example, specifically elaborates its process parameters, and its preparation process refers to figure 1 , including the following steps:
[0036] Step 1: Ultrasonic cleaning the quartz substrate with acetone, absolute ethanol, and deionized water in sequence to remove organic matter and residual impurities on the surface of the quartz substrate;
[0037] Step 2: Put the cleaned quartz substrate into the deposition chamber of microwave plasma chemical vapor deposition equipment, grow a nano-diamond film on the surface of the quartz substrate, and the grown nano-diamond film forms a diamond substrate with a thickness of 600nm to 800nm;
[0038] Step 3: The diamond substrate is heated and oxidized in the air to remove the surface graphite. During the heating process, the heating and cooling rate is 200°C / h, the heating temperature is 550°C, and the hol...
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