Crystal planting doping preparation method of nano-diamond transition metal color center
A nano-diamond and transition metal technology, which is applied in the coating process of metal materials, gaseous chemical plating, coating, etc., can solve problems such as the difficulty of introducing transition metal elements, and achieve the effect of promoting production and strong adaptability
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[0035] The present invention takes the crystal implantation doping preparation method of nano-diamond titanium color centers as an example, specifically elaborates its process parameters, and its preparation process refers to figure 1 , including the following steps:
[0036] Step 1: Ultrasonic cleaning of the quartz substrate with acetone, absolute ethanol, and deionized water in sequence to remove organic matter and residual impurities on the surface of the quartz substrate;
[0037] Step 2: Put the cleaned quartz substrate into the deposition chamber of microwave plasma chemical vapor deposition equipment, grow a nano-diamond film on the surface of the quartz substrate, and the grown nano-diamond film forms a diamond substrate with a thickness of 600nm to 800nm;
[0038] Step 3: The diamond substrate is heated and oxidized in the air to remove the surface graphite. During the heating process, the heating and cooling rate is 200°C / h, the heating temperature is 550°C, and the...
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