A planetary grinding device and grinding method for a plane optical element
A technology for optical components and grinding devices, which is applied in the direction of grinding devices, optical surface grinders, grinding machine tools, etc., can solve the problems of reduced processing accuracy, small removal amount, and large removal amount, so as to ensure contact stability, increase grinding speed, The effect of improving processing efficiency
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[0034] The present invention is described in further detail below in conjunction with accompanying drawing:
[0035] Such as figure 1As shown, a planetary grinding device for a plane optical element of the present invention includes a grinding table 1 and a workpiece disc 2, the lower end of the grinding table 1 is provided with a grinding disc spindle 3 for driving the grinding table 1 to rotate, and the workpiece disc 2 is arranged on the grinding table 1 The upper end, the lower end surface of the workpiece disc 2 is parallel to the upper end surface of the grinding table 1, the upper end of the workpiece disc 2 is fixed with the workpiece disc drive shaft 4 for driving the workpiece disc 2 to rotate, the rotation center of the workpiece disc drive shaft 4 and the rotation of the grinding disc spindle 3 The center does not coincide; the workpiece plate 2 is provided with a plurality of fixture positioning holes 5, and the plurality of fixture positioning holes 5 are arrayed...
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