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Synthesis device and method of gallium antimonide polycrystalline raw material

A synthesis device and gallium antimonide technology, applied in polycrystalline material growth, chemical instruments and methods, single crystal growth, etc. Raw materials deviate from the stoichiometric ratio, etc., to achieve good process repeatability and avoid a large amount of volatilization

Active Publication Date: 2020-09-11
苏州燎塬半导体有限公司
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Problems solved by technology

At present, the synthesis of gallium antimonide polycrystalline raw materials in China is through the reaction of elemental antimony and elemental gallium in an open quartz crucible. Since antimony is extremely volatile at high temperatures, the synthesized antimony gallium polycrystalline raw materials seriously deviate from the stoichiometric ratio. , thus adversely affecting the subsequent growth of GaSB single crystals

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  • Synthesis device and method of gallium antimonide polycrystalline raw material

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Embodiment Construction

[0015] The synthesis device and method of the present invention will be further described below in conjunction with the examples and accompanying drawings.

[0016] A synthesis device of gallium antimonide polycrystalline raw material, as attached figure 1 As shown, it specifically includes: quartz plug 1, oxyhydrogen flame sintered quartz weld 2, quartz outer crucible 3, quartz disc 4, quartz inner crucible 5, high-purity gallium liquid 6, high-purity antimony particles 7, V-shaped mouth Quartz base 8, alumina heat preservation material 9, heating resistance wire 10, crucible rotating shaft 11. Among them, the quartz inner crucible 5 is used to contain high-purity gallium (6N) liquid 6 and high-purity antimony (6N) particles 7; the V-shaped quartz base 8 is used to fix the quartz inner crucible 5; the quartz disc 4 is placed in the quartz The upper end of the crucible 5 is used to prevent antimony volatilization at high temperature; the quartz inner crucible 5 and the V-shap...

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Abstract

The invention relates to a synthesis device and method of a gallium antimonide polycrystalline raw material. According to the device, the sealed ampoule bottle is adopted, and the unique quartz crucible structure and process design are combined, so that a large amount of elemental antimony is prevented from being volatilized at high temperature, the gallium antimonide polycrystalline raw materialwith the stoichiometric ratio close to 1: 1 is successfully obtained, and the device has excellent process repeatability.

Description

technical field [0001] The invention relates to a synthesis device and method of gallium antimonide polycrystalline raw materials, belonging to the field of single crystal material preparation. Background technique [0002] Gallium antimonide is a III-V compound semiconductor material. It is an ideal substrate material for III-V ternary and quaternary solid solution alloys in the spectral range of 0.8um-4um. It is used in the next generation of optical fiber communication and Long-wave infrared detection has great application prospects. However, the preparation of high-quality gallium antimonide single crystals requires gallium antimonide polycrystalline raw materials with a stoichiometric ratio of antimony and gallium elements close to 1:1. At present, the synthesis of gallium antimonide polycrystalline raw materials in China is through the reaction of elemental antimony and elemental gallium in an open quartz crucible. Since antimony is extremely volatile at high temperat...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B29/40C30B28/00
CPCC30B28/00C30B29/40
Inventor 吕冰
Owner 苏州燎塬半导体有限公司
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