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Evaporation source of vacuum evaporation equipment

An evaporation source and evaporation technology, which is used in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of poor process consistency and repeatability, and achieve the goal of reducing raw material cost and reducing composition deviation. Effect

Pending Publication Date: 2020-08-04
GUANGZHOU XIANYI ELECTRONICS TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This compositional deviation is difficult to be accurately controlled by adjusting process parameters, changing the ratio of raw materials, etc., which makes the process consistency and repeatability poor

Method used

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  • Evaporation source of vacuum evaporation equipment

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Embodiment Construction

[0023] The above solution will be further described below in conjunction with specific embodiments. It should be understood that these examples are used to illustrate the present invention and not to limit the scope of the present invention. The implementation conditions used in the examples can be further adjusted according to the conditions of specific manufacturers, and the implementation conditions not indicated are usually the conditions in routine experiments.

[0024] Such as figure 1 As shown, the evaporation source of the vacuum evaporation equipment of the present invention includes: a crucible 1 , a heating part 2 , an evaporation part 3 , and a drainage beam 4 .

[0025] Wherein, the crucible 1 is a hollow circular platform with an opening at one end, and the evaporation raw material 5 is contained in the above-mentioned crucible 1; preferably, the shape of the above-mentioned crucible 1 can also be a cylinder, a cone, etc.; the heat-resistant temperature of the a...

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Abstract

The invention discloses an evaporation source of a vacuum evaporation equipment. The evaporation source of the vacuum evaporation equipment comprises a crucible and a heating part, and the heating part is evenly arranged on the outer periphery of the crucible; the crucible is arranged on the side upper part of an evaporation source body, and a small hole is formed in the bottom of the crucible; aflow guiding beam is arranged between the small hole in the bottom of the crucible and an evaporation part; and one end of the flow guiding beam is arranged on the evaporation part, and the other endof the flow guiding beam penetrates through the small hole in the bottom of the crucible and extends into the crucible. According to the evaporation source of the vacuum evaporation equipment, since an evaporation raw material is gradually transported along the flow guiding beam in a liquid state, and the evaporation raw material is quickly evaporated when reaching the evaporation part, so that the component deviation caused by heating and evaporating all the raw materials at the same time is reduced. Meanwhile, the evaporation source has low requirements on the shape of the evaporation raw material, and the evaporation raw material does not need to be prepared into special shapes such as powder or filiform, so that the cost of raw materials is reduced.

Description

technical field [0001] The invention belongs to the technical field of vacuum deposition, and in particular relates to an evaporation source of vacuum evaporation equipment. Background technique [0002] Vacuum evaporation, referred to as evaporation, refers to the process of evaporating and vaporizing the coating material (or film material) by using a certain heating and evaporation method under vacuum conditions, and the particles fly to the surface of the substrate to condense into a film. Evaporation is an earlier and widely used gas phase deposition technology, which has the advantages of simple film forming method, high film purity and compactness, unique film structure and performance, etc. [0003] Vacuum evaporation is the key technology of vacuum evaporation, nano-material preparation and other processes, and the evaporation source is the core component of vacuum evaporation equipment. The evaporation raw material is heated in the evaporation source and evaporated...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/26
CPCC23C14/243C23C14/26
Inventor 陈卫民王捷
Owner GUANGZHOU XIANYI ELECTRONICS TECH
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