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Reduction furnace bell inner wall spraying device, spraying method and reduction furnace

A spraying device and bell jar technology, applied in spraying devices, devices for coating liquid on surfaces, coatings, etc., can solve the problems of easy oxidation of coatings, increase spraying costs, etc., to avoid oxidation, high bonding strength, retention Effects of Intrinsic Properties

Active Publication Date: 2021-03-09
ASIA SILICON QINGHAI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the existing spraying device for the inner wall of the bell jar of the reduction furnace, the spray gun and the inner wall of the bell jar are exposed to the atmospheric environment. Due to the contact with oxygen, there is a problem that the coating is easily oxidized during the spraying process.
And the inner wall of the bell jar is at room temperature before spraying, which requires higher spraying conditions (temperature and pressure), which will undoubtedly increase the cost of spraying

Method used

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  • Reduction furnace bell inner wall spraying device, spraying method and reduction furnace

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Effect test

Embodiment approach

[0061] As a preferred embodiment of the present invention, the rotating component 20 includes a rotating mechanism and a driving mechanism, the driving mechanism is used to drive the rotating mechanism to rotate, and the rotating mechanism is connected to the flange on the bell housing 10 .

[0062] Wherein, the driving mechanism may include a driving motor, the power output shaft of the driving motor is provided with a protrusion, and the rotating mechanism includes a gear plate, and the gear plate is provided with a groove matching the protrusion. After the drive motor is started, the power output shaft rotates to drive the gear plate to rotate, and the gear plate is connected with the flange plate bolts on the bell 10 to drive the bell 10 to rotate.

[0063] As an optional embodiment of the present invention, the sealing member 30 includes a rotating part 31 and a stationary part 32, and the rotating part 31 is connected to the stationary part 32;

[0064] The rotating part...

Embodiment 1

[0100] This embodiment provides a reduction furnace bell inner wall spraying device, specifically as figure 1 As shown, it includes a bell jar 10, a rotating part 20, a sealing part 30, a vacuum part 40, an exhaust part 50, a cold gas power spraying part 60 and a control part (not shown);

[0101] The rotating part 20 is arranged on the outside of the bell jar 10, the sealing part 30 is arranged at the opening of the bell jar 10, the vacuuming part 40 and the exhaust part 50 are all communicated with the inside of the bell jar 10 through the sealing part 30, and the cold gas dynamic spraying part 60 is arranged Inside the bell jar 10 and connected with the sealing member 30, it is used to transport high-temperature protective gas and spray powder into the bell jar 10;

[0102] Wherein, the rotating part 20 includes a driving motor and a gear plate. The power output shaft of the driving motor is provided with a protrusion, and the gear plate is provided with a groove matching w...

Embodiment 2

[0110] This embodiment provides a kind of reduction furnace bell jar inner wall spraying device, except that the nickel matrix layer is arranged on the inner wall of the bell jar 10, the outer surface of the bell jar 10 and the outer surface of the sealing member 30 are respectively provided with an insulating layer ( figure 1 Not shown), the rest of the components and structure are the same as in Embodiment 1.

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Abstract

The invention provides a reduction furnace bell inner wall spraying device, a spraying method and a reduction furnace, and relates to the technical field of polysilicon equipment. The spraying device includes a bell jar, a rotating part, a sealing part, a vacuum pumping part, an exhaust part and a cold gas power spraying part, and after the sealing part is used to form a closed space inside the bell jar, the vacuum pumping part, the cold gas power spraying part and the The exhaust part makes the inside of the bell jar under the high-temperature protective gas atmosphere, and then uses the cold gas power spraying part to spray powder on the inner wall of the bell jar to form a coating on the inner wall of the bell jar, wherein the inside of the bell jar is kept under high temperature protection before spraying In the atmosphere of inert gas, the oxidation of the coating can be avoided during the spraying process, and the intrinsic properties of the coating material can be preserved to the greatest extent. Coating with high bond strength. The invention also provides a method for spraying the inner wall of the bell jar of the reduction furnace.

Description

technical field [0001] The invention belongs to the technical field of polysilicon equipment, and in particular relates to a reduction furnace bell inner wall spraying device, a spraying method and a reduction furnace. Background technique [0002] Polysilicon is the basic material of the microelectronics industry and the photovoltaic industry, and the improved Siemens method is currently the mainstream method for preparing polysilicon. The characteristic of the improved Siemens method is: in a bell-type chemical vapor deposition (CVD) reactor (the industry term is a polysilicon reduction furnace), the fine silicon core heated to a temperature of 950-1150 °C is used as a deposition carrier, and the The trichlorosilane and hydrogen in the polysilicon reduction furnace undergo a hydrogen reduction reaction on the surface of the hot silicon core, and the reduced silicon is deposited on the surface of the silicon core. With the progress of the hydrogen reduction reaction, the di...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05B13/06B05D1/12B05D3/04B05D7/22
CPCB05B13/069B05D1/12B05D3/0473B05D7/227
Inventor 张宝顺王体虎宗冰
Owner ASIA SILICON QINGHAI
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