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Cleaning method of graphite boat for manufacturing solar cells

A technology for solar cells and graphite boats, applied in cleaning methods and appliances, chemical instruments and methods, gaseous chemical plating, etc., can solve the problems of difficult control of film thickness, long cleaning time, low efficiency, etc., and achieve improved cleaning Efficiency and cleaning effect, reduction of factory environmental protection pressure, and high production efficiency

Inactive Publication Date: 2020-06-05
山东伟基炭科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The cleaning efficiency of the graphite boat and the quality of the cleaning effect greatly affect the production efficiency of the tubular PECVD system and the quality of the coating. If the cleaning method is not proper, not only is too much production time wasted, but the cleaning effect is not good , in the production of coating, the thickness of the film is difficult to control, and the proportion of color difference increases, which seriously affects the production efficiency and benefit
[0007] At present, the graphite boat is generally cleaned by immersing in HF acid liquid, then rinsed with pure water, and then air-dried and oven-dried. There are many links and the cleaning time is very long. First, the whole graphite boat is immersed in HF Put the acid in the tank for about 6 hours, then rinse it with deionized pure water for 2 hours, and then dry it in the oven for 6-8 hours. One pickling tank can only process 4 graphite boats at the same time, which is inefficient, and hydrofluoric acid is harmful to the environment. It is harmful to the human body, and it is difficult to recycle the waste HF acid produced after a period of use

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] A cleaning method for a graphite boat used to manufacture solar cells, comprising the following steps in sequence:

[0037] 1) Put the graphite boat into the vacuum sintering furnace and arrange it neatly for sintering multiple graphite boats at the same time;

[0038] 2) The vacuum sintering furnace starts vacuuming and heating to carry out vacuum sintering;

[0039]In step 2), when the furnace cavity temperature in the vacuum sintering furnace is -30°C to 50°C, the vacuum degree in the furnace is controlled to be ≤0.1Pa;

[0040] Control when the temperature of the furnace chamber in the vacuum sintering furnace is 50 ° C ~ 1550 ° C, the vacuum degree in the furnace is ≤ 10 Pa;

[0041] The heating and holding process of the furnace chamber temperature of the vacuum sintering furnace is as follows: firstly, the temperature is raised to 600°C after 120 minutes, then the temperature is kept at 600°C for 10 minutes, then the temperature is raised to 1100°C after 120 min...

Embodiment 2

[0047] A cleaning method for a graphite boat for manufacturing a solar cell sheet, comprising the following steps in sequence:

[0048] 1) Put the graphite boat into the vacuum sintering furnace and arrange it neatly for sintering multiple graphite boats at the same time;

[0049] 2) The vacuum sintering furnace starts vacuuming and heating to carry out vacuum sintering;

[0050] In step 2), when the furnace cavity temperature in the vacuum sintering furnace is -30°C to 50°C, the vacuum degree in the furnace is controlled to be ≤0.1Pa;

[0051] Control when the temperature of the furnace chamber in the vacuum sintering furnace is 50 ° C ~ 1550 ° C, the vacuum degree in the furnace is ≤ 10 Pa;

[0052] The heating and holding process of the furnace chamber temperature of the vacuum sintering furnace is as follows: firstly, the temperature is raised to 600°C after 120 minutes, then the temperature is kept at 600°C for 10 minutes, and then the temperature is raised to 1100°C aft...

Embodiment 3

[0058] A cleaning method for a graphite boat for manufacturing a solar cell sheet, comprising the following steps in sequence:

[0059] 1) Put the graphite boat into the vacuum sintering furnace and arrange it neatly for sintering multiple graphite boats at the same time;

[0060] 2) The vacuum sintering furnace starts vacuuming and heating to carry out vacuum sintering;

[0061] In step 2), when the furnace cavity temperature in the vacuum sintering furnace is -30°C to 50°C, the vacuum degree in the furnace is controlled to be ≤0.1Pa;

[0062] Control when the temperature of the furnace chamber in the vacuum sintering furnace is 50 ° C ~ 1550 ° C, the vacuum degree in the furnace is ≤ 10 Pa;

[0063] The heating and holding process of the furnace chamber temperature of the vacuum sintering furnace is as follows: firstly, the temperature is raised to 600°C after 120 minutes, then the temperature is kept at 600°C for 10 minutes, and then the temperature is raised to 1100°C aft...

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Abstract

The invention provides a cleaning method of a graphite boat for manufacturing solar cells. The cleaning method of the graphite boat for manufacturing the solar cells comprises the steps that the graphite boat with impurities is put into a vacuum sintering furnace to be subjected to vacuum high-temperature sintering, the impurities attached to the graphite boat are changed into gas to be separatedfrom the graphite boat in the vacuum high-temperature sintering process, the gas converted from the impurities is pumped away by a vacuum pump and conveyed to a tail gas treatment system to be subjected to tail gas purifying treatment, and then the impurities such as foreign matter film on the surface of the graphite boat are burnt off. According to the cleaning method of the graphite boat for manufacturing the solar cells, the graphite boat can be cleaned up in a short time, no chemical agent such as HF acid is used in the whole process, no environmental pollution hidden danger exists, the environmental protection pressure for factories is reduced, no harm is generated to operating personnel, and the cleaning efficiency and the cleaning effect are improved; the graphite boat does not needto be disassembled, and damage to the graphite boat in the disassembling process is avoided; and in addition, few treatment link is needed, the cleaning time is short, and the production efficiency is higher.

Description

technical field [0001] The invention relates to the technical field of tubular PECVD, in particular to a method for cleaning graphite boats used for manufacturing solar cells. Background technique [0002] Solar cells are divided into crystalline silicon and amorphous silicon, and crystalline silicon cells can be divided into monocrystalline cells and polycrystalline cells. The production process of solar cells is as follows: silicon wafer detection→surface texturing and picklingdiffusion PN junction→phosphorous silicon glass→plasma etching and pickling→PECVD anti-reflection coatingscreen printing positive and negative electrodes→ Fast sintering etc. [0003] Among the above, PECVD anti-reflection coating: the reflectivity of the polished silicon surface is 35%. In order to reduce surface reflection and improve the conversion efficiency of the battery, a layer of silicon nitride anti-reflection film needs to be deposited; PECVD equipment is often used in industrial produc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B7/00C23C16/458C23C16/50
CPCB08B7/0085C23C16/458C23C16/50
Inventor 陈岩姜明理薛雁恺朱敏慧
Owner 山东伟基炭科技有限公司
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