Cleaning method of graphite boat for manufacturing solar cells
A technology for solar cells and graphite boats, applied in cleaning methods and appliances, chemical instruments and methods, gaseous chemical plating, etc., can solve the problems of difficult control of film thickness, long cleaning time, low efficiency, etc., and achieve improved cleaning Efficiency and cleaning effect, reduction of factory environmental protection pressure, and high production efficiency
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Embodiment 1
[0036] A cleaning method for a graphite boat used to manufacture solar cells, comprising the following steps in sequence:
[0037] 1) Put the graphite boat into the vacuum sintering furnace and arrange it neatly for sintering multiple graphite boats at the same time;
[0038] 2) The vacuum sintering furnace starts vacuuming and heating to carry out vacuum sintering;
[0039]In step 2), when the furnace cavity temperature in the vacuum sintering furnace is -30°C to 50°C, the vacuum degree in the furnace is controlled to be ≤0.1Pa;
[0040] Control when the temperature of the furnace chamber in the vacuum sintering furnace is 50 ° C ~ 1550 ° C, the vacuum degree in the furnace is ≤ 10 Pa;
[0041] The heating and holding process of the furnace chamber temperature of the vacuum sintering furnace is as follows: firstly, the temperature is raised to 600°C after 120 minutes, then the temperature is kept at 600°C for 10 minutes, then the temperature is raised to 1100°C after 120 min...
Embodiment 2
[0047] A cleaning method for a graphite boat for manufacturing a solar cell sheet, comprising the following steps in sequence:
[0048] 1) Put the graphite boat into the vacuum sintering furnace and arrange it neatly for sintering multiple graphite boats at the same time;
[0049] 2) The vacuum sintering furnace starts vacuuming and heating to carry out vacuum sintering;
[0050] In step 2), when the furnace cavity temperature in the vacuum sintering furnace is -30°C to 50°C, the vacuum degree in the furnace is controlled to be ≤0.1Pa;
[0051] Control when the temperature of the furnace chamber in the vacuum sintering furnace is 50 ° C ~ 1550 ° C, the vacuum degree in the furnace is ≤ 10 Pa;
[0052] The heating and holding process of the furnace chamber temperature of the vacuum sintering furnace is as follows: firstly, the temperature is raised to 600°C after 120 minutes, then the temperature is kept at 600°C for 10 minutes, and then the temperature is raised to 1100°C aft...
Embodiment 3
[0058] A cleaning method for a graphite boat for manufacturing a solar cell sheet, comprising the following steps in sequence:
[0059] 1) Put the graphite boat into the vacuum sintering furnace and arrange it neatly for sintering multiple graphite boats at the same time;
[0060] 2) The vacuum sintering furnace starts vacuuming and heating to carry out vacuum sintering;
[0061] In step 2), when the furnace cavity temperature in the vacuum sintering furnace is -30°C to 50°C, the vacuum degree in the furnace is controlled to be ≤0.1Pa;
[0062] Control when the temperature of the furnace chamber in the vacuum sintering furnace is 50 ° C ~ 1550 ° C, the vacuum degree in the furnace is ≤ 10 Pa;
[0063] The heating and holding process of the furnace chamber temperature of the vacuum sintering furnace is as follows: firstly, the temperature is raised to 600°C after 120 minutes, then the temperature is kept at 600°C for 10 minutes, and then the temperature is raised to 1100°C aft...
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