Chemical tank car dispatching system

Abstract

The invention provides a chemical tank car dispatching system. The framework of the chemical tank car dispatching system mainly comprises a plurality of first sensors and a car dispatching control device, wherein the plurality of first sensors are respectively arranged in the plurality of chemical accommodating tanks, and are used for carrying out liquid level accurate passing sensing. And moreover, when a liquid level signal sent by any one of the first sensors shows that the chemical liquid in the chemical accommodating tank reaches a pre-defined car dispatching liquid level through the liquid level, the control module sends a car dispatching notice. Particularly, the car dispatching control device is provided with a plurality of warning modules and a timing module, and is used for limiting the chemical tank car to finish the chemical filling operation within a specified time limit.

Description

technical field [0001] The present invention relates to the technical field of semiconductor manufacturing process, in particular to a chemical tank car dispatching system, which is used to assist IC foundries to allocate chemical tank cars in real time according to the capacity of chemical storage tanks into the factory. Background technique [0002] The process of semiconductor integrated circuits includes basic semiconductor processes such as thin film deposition, diffusion, lithographic etching, and ion implantation; and, in the process of manufacturing semiconductor integrated circuits, a large number of chemicals must be used to meet the needs of the process. In particular, the manufacture of semiconductor integrated circuits must maintain an uninterrupted production process at all times, therefore, the supply of these chemicals must also be maintained uninterrupted. Based on such reasons, when the integrated circuit manufacturing plant plans the factory area, at leas...

AI Technical Summary

Problems solved by technology

However, what the factory staff ignores is that the manufacture of semiconductor integrated circuits keeps the production flow uninterrupted all the time; During a period of time, the chemical liquid in the chemical storage tank 2' will still be continuously extracted and used due to process requirements

It is conceivable that once the chemical liquid in the chemical storage tank 2' is used up, it may cause a process error in the semiconductor integrated circuit.

Process errors like this will inevitably lead to significant losses for the IC fab and its customers

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