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A metal-oxide thin film thermocouple and its preparation method

An oxide and thermocouple technology, applied in metal material coating process, thermometer with directly sensitive electric/magnetic components, measuring heat, etc., can solve the problem of low thermoelectric output, material melting point failure, low thermoelectric output And other issues

Active Publication Date: 2020-10-27
XI AN JIAOTONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] At present, as long as it is aimed at thermoelectric materials, it is metal thin film thermocouple or oxide thin film thermocouple. In the existing research, thin film ITO and In2O3 materials have become the core materials of choice for high temperature measurement in oxides, but this oxide material Above 1300°C, due to the melting point of the material itself, it fails
The traditional material tungsten-rhenium alloy (W-Re526) has also been studied for high-temperature environment measurement. This thermocouple can survive and output for a long time at 1600 ° C, but the thermoelectric output is lower than that of oxide materials.
Therefore, in order to comprehensively consider the survivability and thermoelectric output of thermocouples at high temperatures, a new combination of thermoelectric materials is proposed to break the defect of low thermoelectric output of traditional thermocouples, and at the same time, compared with pure oxide thermocouples, it has greater thermoelectricity. Output capacity and high temperature resistance

Method used

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  • A metal-oxide thin film thermocouple and its preparation method
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  • A metal-oxide thin film thermocouple and its preparation method

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Embodiment Construction

[0020] The present invention is described in further detail below in conjunction with accompanying drawing:

[0021] Metal materials must be resistant to high temperature and oxidation. Among traditional metal thermoelectric materials, K-type and S-type thermoelectric materials have poor high-temperature resistance, and C-type thermoelectric materials are the first choice. Traditional C-type thermocouple thermoelectric materials include WRe3 / 25 and WRe6 / 25. Among them, WRe6 / 25 has a larger thermoelectric output, so choose among these two alloy materials, WRe6 / 25.

[0022] Because tungsten-rhenium thermocouples oxidize in air for a certain period of time, thermoelectric potential mutations will occur, and the oxidation speeds of W-5%Re and W-25%Re alloys that constitute the positive and negative electrodes are different. They will have different effects on the stability of thermocouples. Studies have shown that the positive and negative poles of tungsten-rhenium thermocouples ...

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Abstract

The invention discloses a metal-oxide type thin-film thermocouple and a preparation method thereof. The metal-oxide type thin-film thermocouple comprises a substrate, and a tungsten-rhenium 26 thin film region and an indium oxide thin film region, wherein the tungsten-rhenium 26 thin film region and the indium oxide thin film region are arranged on the substrate. The tungsten-rhenium 26 thin filmregion is in contact with the indium oxide thin film region. Tthe thermocouple has the characteristics of high temperature resistance and high thermoelectric output capability, and the preparation method is simple.

Description

technical field [0001] The invention belongs to the field of sensor preparation technology and high-temperature temperature measurement technology, and relates to a metal-oxide thin film thermocouple and a preparation method thereof. Background technique [0002] In aero-engine design and verification experiments, in order to verify the combustion efficiency of the engine and the design of the cooling system, it is necessary to accurately test the temperature of the engine turbine blade surface, the inner wall of the combustion chamber and other parts. Compared with traditional linear and block thermocouples, high-temperature ceramic thin-film thermocouples have the characteristics of small heat capacity, small size, and fast response speed, and can capture instantaneous temperature changes. At the same time, thin-film thermocouples can be directly deposited on the surface of the measured object , does not damage the structure of the tested part, and has little impact on the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K7/04C23C14/08C23C14/18C23C14/35
CPCC23C14/086C23C14/185C23C14/35G01K7/04
Inventor 田边刘延张仲恺刘兆钧刘江江汪存峰史鹏林启敬蒋壮德
Owner XI AN JIAOTONG UNIV
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