High-spatial resolution flexible film thermocouple temperature sensor

Abstract

The invention discloses a high-spatial resolution flexible film thermocouple temperature sensor. The sensor comprises a flexible insulating substrate as well as a positive electrode thermocouple filmarray and a negative electrode thermocouple film array sequentially deposited on the surface of the flexible insulating substrate; the positive electrode thermocouple film array and the negative electrode thermocouple film array have a plurality of overlapping regions; the overlapping regions of the positive electrode thermocouple film array and the negative electrode thermocouple film array constitute thermal nodes; the surface of the flexible insulating substrate is divided into a sensitive region and a non-sensitive region; the thermal nodes are located in the sensitive region; the end portions of each positive electrode thermocouple film in the positive electrode thermocouple film array and the end portions of each negative electrode thermocouple film in the negative electrode thermocouple film array are connected with cold ends respectively; and the cold ends are located in a non-sensitive region. The sensor can accurately measure the temperature of a plurality of points to be measured under a condition that the number of sensors is not increased. The sensor has the advantages of simple structure, high reliability, high durability and low cost.

Description

technical field [0001] The invention belongs to the technical field of temperature distribution monitoring in micro regions, and relates to a flexible film thermocouple temperature sensor with high spatial resolution. Background technique [0002] As the most basic physical quantity representing the state and performance changes of objects, temperature plays an important role in industrial and agricultural production and daily life. Therefore, accurate detection of temperature has very important social value. According to the principle, temperature sensors can be divided into resistive temperature sensors, pyroelectric temperature sensors, optical fiber temperature sensors, infrared temperature measurement sensors, etc., but these temperature sensors have problems such as large size, complex structure, and low spatial and temporal resolution. With the development of intelligent robots, the Internet of Things and aerospace technology, the demand for monitoring temperature dis...

AI Technical Summary

Problems solved by technology

According to the principle, temperature sensors can be divided into resistive temperature sensors, thermoelectric temperature sensors, optical fiber temperature sensors, infrared temperature measurement sensors, etc., but these temperature sensors have problems such as large size, complex structure, and low spatial and temporal resolution.

With the development of intelligent robots, the Internet of Things and aerospace technology, the demand for monitoring temperature distribution in small areas is increasing, and traditional temperature sensors need to increase the number of sensors in order to improve the spatial resolution of the measurement area. To make it difficult to lead, the test circuit is complicated, and the cost is high.

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