Optical fiber acoustic vibration sensor based on gold-plated vibration film and manufacturing method thereof

Abstract

The invention discloses an optical fiber acoustic vibration sensor based on a gold-plated vibration film and a manufacturing method thereof. The optical fiber acoustic vibration sensor comprises a vibrating diaphragm (1), a single-mode optical fiber (3) having the end surface containing a tantalum pentoxide coating, and a supporting structure of a sensing head; a gold plating layer (4) is arrangedon the inner surface of the vibrating diaphragm (1); and a through hole (2) is arranged between the vibrating diaphragm (1) and the single-mode optical fiber (3) with the tantalum pentoxide coating on the end face. The supporting structure of the sensing head is composed of the through hole (2), a D-shaped tube (5), a capillary tube (6) and an epoxy resin adhesive layer (7), and a resonance microcavity is formed between the single-mode optical fiber (3) with the tantalum pentoxide coating on the end face and the vibrating diaphragm (1). According to the invention, the high reflectivity is effectively ensured, the effective measurement bandwidth is improved, and the interference signal quality is improved.

Description

technical field [0001] The invention relates to the technical field of optical fiber acoustic vibration sensors, in particular to an optical fiber acoustic vibration sensor and a manufacturing method thereof. Background technique [0002] Optical fiber Fabry-Perot acoustic vibration sensor is a kind of optical fiber acoustic vibration sensor, which can be used to measure vibration signal, small displacement, and also to detect multi-band acoustic wave signal. It usually consists of the end face of the fiber and the inner surface of the diaphragm to form a Fabry-Perot microresonator cavity. When the external sound wave pressure acts on the diaphragm, the diaphragm will be deformed and the length of the Fabry cavity will change. The reflected light generated on the inner surface of the diaphragm interferes and carries the information of the change of the Fab cavity length. Spectroscopy or other demodulation methods are used to obtain the interference fringe information and dem...

AI Technical Summary

Problems solved by technology

[0005] The present invention aims to propose a fiber optic acoustic vibration sensor based on a gold-plated vibrating film and its manufacturing method, which adopts a reflective structure designed based on the Fabry-Perot principle, and adopts an innovative double-through-hole structure in structure to solve the problem of While effectively ensuring high reflectivity, it is a technical problem to increase the effective measurement bandwidth and improve the quality of interference signals

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