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A waveguide grating coupler based on photothermosensitive refractive glass and its preparation method

A waveguide grating and photothermographic technology, applied in the field of integrated optics, can solve the problems of unseen waveguide grating coupler, difficult control of beam interference, etc., and achieve the effect of light weight, excellent optical characteristics, and high integration

Active Publication Date: 2021-04-27
NANJING UNIV OF POSTS & TELECOMM
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  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Its appearance overcomes the technical defects of the traditional volume grating recording medium, and it is a rare multifunctional material for the preparation of diffractive optical devices; however, there has been no report of a waveguide grating coupler based on PTR glass
[0006] The commonly used grating preparation method is the double-beam interference method, but the disadvantage is that the interference of the beams is difficult to control, so it is necessary to explore and develop a simpler preparation method

Method used

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  • A waveguide grating coupler based on photothermosensitive refractive glass and its preparation method
  • A waveguide grating coupler based on photothermosensitive refractive glass and its preparation method
  • A waveguide grating coupler based on photothermosensitive refractive glass and its preparation method

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preparation example Construction

[0037] The present invention also discloses a method for preparing a waveguide grating coupler based on photothermosensitive refractive glass. The method includes the following steps:

[0038] S1: Sample pretreatment

[0039] Cut the photothermographic glass to a suitable size, perform optical polishing and cleaning on the surface;

[0040] Specifically, the PTR glass sample is cut to obtain a suitable size, and the surface to be processed is optically polished, and the polished sample needs to be cleaned before the ion implantation operation.

[0041] S2: Preparation of planar waveguide structure

[0042] Put the photothermographic glass sample cut in step S1 into the ion accelerator, select appropriate implantation conditions for ion implantation, and finally form a planar waveguide layer by ion bombardment on the surface of the sample.

[0043] The pretreated sample is ion-implanted to obtain a planar waveguide structure. In step S2, ion implantation includes light ion i...

Embodiment 1

[0057] according to figure 2 The preparation process schematic diagram carries out the following steps successively:

[0058] (1) First cut the sample PTR glass into a size of 10.0×5.0×1.0mm 3 , and to 10.0 x 5.0mm 2 The surface of the sample is optically polished, and then the polished sample is cleaned with acetone, ethanol and deionized water to remove surface impurities to meet the requirements of subsequent ion implantation to form an optical waveguide.

[0059] (2) Use an ion beam accelerator with an energy of 400keV and a dose of 4.0×10 16 ions / cm 2 hydrogen ions, so that the hydrogen ions are implanted into the PTR glass to form a planar waveguide, such as image 3 (b) shown.

[0060] (3) Femtosecond laser pulse longitudinal ablation is used on the planar optical waveguide prepared by ion implantation, such as Figure 4 shown. A femtosecond laser with a center wavelength of 800 nm, a pulse width of 220 fs, and a pulse repetition frequency of 1 kHz is focused on...

Embodiment 2

[0064] according to figure 2 The preparation process schematic diagram carries out the following steps successively:

[0065] (1) The size of the sample PTR glass after cutting is 10.0×5.0×1.0mm 3 , and optically polish the upper surface of the cut sample PTR glass; the polished sample needs to be cleaned to remove surface impurities.

[0066] (2) Passing energy is 6MeV, dose is 5.0×10 14 ions / cm 2 Carbon ions are implanted into the cleaned PTR sample to form a planar waveguide, the structure is as follows image 3 (b) shown.

[0067] (3) A ridge-shaped waveguide structure is prepared on the planar optical waveguide by femtosecond laser ablation technology, so that it limits the propagation of light in two dimensions. Place the sample on a three-dimensional mobile platform controlled by a computer, use the Ti:Sapphire laser system to output femtosecond laser pulses with a central wavelength of light source of 800nm, a repetition rate of 1kHz, and a pulse width of 220fs, ...

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Abstract

The invention discloses a waveguide grating coupler based on photothermo-sensitive refraction glass and a preparation method thereof. The waveguide grating coupler includes a substrate material, a ridge optical waveguide structure and a grating, and the substrate material is photothermal Refractive glass, the ridge-shaped optical waveguide structure is prepared on the surface of the substrate material by ion implantation and femtosecond laser ablation technology, and the grating is integrated and prepared on the surface of the ridge-shaped optical waveguide structure by femtosecond laser writing technology. The invention only needs to use ion implantation and femtosecond laser processing technology to realize the preparation of the ridge waveguide grating coupler. Femtosecond laser processing technology can not only complete the preparation of ridge waveguides but also write gratings, killing two birds with one stone, and the preparation process is simpler and more convenient.

Description

technical field [0001] The invention relates to a waveguide grating coupler based on photothermosensitive folding glass and a preparation method thereof, which can be used in the technical field of integrated optics. Background technique [0002] Grating coupler is one of the important photonic devices in the field of integrated optics, and it is also a practical beam coupler in optical interconnection. It diffracts the optical signal through the grating structure, so that the obliquely incident light is coupled into the waveguide. The various beam coupler structures of the waveguide can be divided into end-face coupling and longitudinal coupling. Compared with other couplers, the grating coupler uses the vertical diffraction light field of the optical waveguide to realize the optical signal input or output coupling, avoiding the traditional end-face coupling process. The precise optical adjustment mount is required for adjustment, which greatly simplifies the coupling oper...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/124G02B6/13G02B6/134
CPCG02B6/124G02B6/13G02B6/1347G02B2006/12097G02B2006/12107G02B2006/12147
Inventor 刘春晓陈静怡
Owner NANJING UNIV OF POSTS & TELECOMM
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