Wireless passive H2 gas sensor based on WO3 and preparation method thereof

Abstract

The invention discloses a wireless passive H2 gas sensor based on WO3 and a preparation method thereof. The gas sensor comprises a ceramic substrate, and an inductance coil and a composite gas sensitive resistor, which are printed on the ceramic substrate, wherein an outer end of the inductance coil is connected with one end of the composite gas sensitive resistor through silver paste filled in athrough hole in the ceramic substrate, and an inner end of the inductance coil is connected with the other end of the composite gas sensitive resistor to form an LR sensitive circuit; the ceramic substrate is made of an aluminium oxide raw ceramic tape and is prepared by an HTC process, the inductance coil is prepared by silk-screen printing process with Ag as paste, and the composite gas sensitive resistor is prepared from a Pt-WO3 composite material by a magnetron sputtering process. The gas sensor disclosed by the invention uses a wireless non-contact measurement method, can accurately realize the detection of a gas H2 to be measured under low temperature conditions by analyzing the threshold that changes with resistance, adopts the mature silk-screen printing process and the magnetronsputtering preparation process, and has the advantages of simple and convenient processing, low cost, etc.

Description

technical field [0001] The invention relates to the technical field of gas sensors, in particular to a WO-based 3 wireless passive H 2 Gas sensor and its preparation method. Background technique [0002] As a renewable energy source, hydrogen is widely used in various important fields. However, hydrogen is extremely flammable, and it is easy to leak and cause explosion during use, causing unpredictable consequences. Therefore, real-time detection of hydrogen is very important. Most of the traditional hydrogen sensors adopt an active and wired test structure. The front end of the sensor needs to be connected to a power supply, and the back end of the test needs to be connected to a complex circuit structure. It has the disadvantages of complex structure, difficult design, etc., and its operating temperature is generally high. Therefore, it is urgent to invent a new wireless passive H 2 Gas sensor to realize the detection of hydrogen in different temperature environments. ...

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Problems solved by technology

[0002] As a renewable energy source, hydrogen is widely used in various important fields. However, hydrogen is extremely flammable, and it is easy to leak and cause explosions during use, causing unpredictable consequences. Therefore, real-time detection of hydrogen is very important

Most of the traditional hydrogen sensors adopt an active and wired test structure. The front end of the sensor needs to be connected to a power supply, and the back end of the test needs to be connected to a complex circuit structure, which has the disadvantages of complex structure and difficult design, and its operating temperature is generally high.

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