Online in-situ type ultrapure water heating system

A heating system and ultra-pure water technology, applied in the industrial field, can solve the problems of large floor space, easy to be polluted, not enough safety, etc., and achieve the effects of simple operation, improved safety and strong practicability

Inactive Publication Date: 2019-11-26
TONGJI UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the existing ultrapure water heating equipment system occupies a large area, the operation is cumbersome and not safe enough, and there is still a problem that the ultrapure water is easily polluted during the process of heating the ultrapure water through the water pipeline

Method used

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  • Online in-situ type ultrapure water heating system
  • Online in-situ type ultrapure water heating system

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Embodiment Construction

[0029] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments. Apparently, the described embodiments are some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0030] Such as figure 1 As shown, the present invention relates to an online in-situ ultrapure water heating system, comprising a quartz heater box 18, a quartz heater 1 and a control module, the quartz heater 1 is arranged in the quartz heater box 18, and the control module Connect with quartz heater 1.

[0031] Quartz heater 1 is a vertical quartz glass tank body, as the inner cavity of the heater, the vertical quartz glass tank body has a certain volume of accommodation space, and has a water inlet 14 at the lower end of the tank...

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Abstract

The invention relates to an online in-situ type ultrapure water heating system which comprises a quartz heater box body and a quartz heater arranged in the box body. The quartz heater is provided witha water inlet, a flushing and discharging end, a water outlet and an exhausting end. External parts of water nozzle ends are of soft connection designs. Three spiral heating wires are mounted in thequartz heater, the power of the heating wires is set according to a rising rate of water temperature, and the water temperature is monitored by a temperature sensor mounted on the top of the heater ina whole course. Compared with the prior art, the online in-situ type ultrapure water heating system is small in occupied space, and has the advantages of meeting the using demands on multi-temperature adjustable ultrapure water in existing industrial field effectively and the like as the ultrapure water is heated in an online in-situ manner without pollution and with high safety.

Description

technical field [0001] The invention relates to the field of industrial technology, in particular to an online in-situ ultrapure water heating system. Background technique [0002] The design basis of ultra-pure water heating equipment is: ultra-pure water is pre-treated through raw water (tap water or ground water), two-stage reverse osmosis equipment, EDI deep desalination equipment, two-stage polishing resin equipment, ultraviolet sterilization equipment and terminal 0.22- Ultrapure water produced by 0.1μm terminal microporous equipment, the ultrapure water terminal index is ≥18.1MΩ.cm (on-line monitoring at 25°C). Such high-purity ultra-pure water is mainly used in the microelectronics industry, optical processing, and precision processing industries. Ultra-pure water at different temperatures is required in the manufacturing process of these industries, so ultra-pure water will not be affected by other materials during the heating process. Pollution is an urgent proble...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F24H1/20F24H9/18F24H9/20C02F1/02
CPCC02F1/02F24H1/202F24H9/1818F24H9/2021
Inventor 栗阳丁涛栗春海
Owner TONGJI UNIV
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