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Resonant cavity type terahertz device and preparation method thereof

A resonant cavity and terahertz wave technology, which is applied in the field of terahertz wave electronic devices, can solve the problem that the terahertz wave modulator cannot have a large modulation depth at the same time, and achieve easy large-scale integration, low energy consumption, and enhanced electric field strength. Effect

Active Publication Date: 2019-10-18
SHENZHEN UNIV
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Problems solved by technology

[0004] In view of the above deficiencies in the prior art, the purpose of the present invention is to provide a resonant cavity-type terahertz wave modulator and its preparation method, aiming at solving the problem that the existing terahertz wave modulators cannot have large modulation depth and high modulation speed at the same time. The problem

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  • Resonant cavity type terahertz device and preparation method thereof
  • Resonant cavity type terahertz device and preparation method thereof
  • Resonant cavity type terahertz device and preparation method thereof

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preparation example Construction

[0046] further, as Figure 4 As shown, the present invention also provides a preparation method of a resonant cavity type terahertz wave modulator, the method comprising the following steps:

[0047] S10, performing surface treatment on the surface of the substrate material, and preparing a conductive layer on the upper surface of the substrate material;

[0048] As an example, a silicon wafer of silicon oxide can be used as a substrate, and the surface of the substrate material is cleaned for use; polymethyl methacrylate is coated on the copper foil grown with graphene to obtain methyl methacrylate / Graphene / copper foil composite; after dissolving the copper foil with a solvent, a methyl methacrylate / graphene composite is obtained. The methyl methacrylate / graphene composite is transferred to the silicon oxide silicon wafer substrate, and the polymer is removed with an organic solvent to obtain a conductive layer.

[0049] S20, transferring the pattern of the grating and the...

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Abstract

The invention relates to a resonant cavity type terahertz wave modulator and a preparation method thereof, used for modulation of terahertz wave. The resonant cavity type terahertz wave modulator is composed of a reflecting layer, a substrate layer, a conducting layer, a metal grating and an electrode; the various layers are arranged in parallel, and connected tightly, wherein the reflecting layeris a metal coating; the substrate layer provides physical support for the device; the conducting layer is positioned below the metal grating; the metal grating has a sub-wavelength structure; and theelectrode is arranged on the conducting layer, and used for being electrically connected with a power supply. The resonant cavity type terahertz wave modulator provided by the invention is that: theelectrical conductivity of the conducting layer between the metal gratings is changed in a voltage regulation manner; simultaneously, with the help of the non-oscillation electric field enhancement effect of the metal grating and a resonant cavity structure, depth and multi-frequency modulation on terahertz wave can be realized; disadvantages or deficiencies in the prior art are solved; and the modulator has the advantages of being deep in modulation depth, rapid in modulation speed, low in energy consumption, modulated in multiple frequency band and simple in manufacturing process.

Description

technical field [0001] The invention relates to the field of terahertz wave electronic devices, in particular to a resonant cavity type terahertz wave modulator and a preparation method thereof. Background technique [0002] Terahertz waves are electromagnetic waves with frequencies ranging from 0.1 THz to 10 THz. Terahertz waves have the following characteristics, such as: low photon energy, no harm to biological tissues, suitable for biopsy of biological tissues; Non-metallic and non-polar substances have high penetrability and can be used in the detection of firearms, explosives and drugs in the field of security; Realize high-speed wireless communication transmission. [0003] The resonant cavity terahertz wave modulator can be used to control the amplitude or phase of the terahertz wave, and is an important component for realizing terahertz imaging. Existing terahertz detectors are expensive. If the traditional detector array imaging mode is used, the large-area detec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/17
CPCG02F1/17G02F2203/13Y02P70/50
Inventor 孙怡雯刘旭东黄嘉良
Owner SHENZHEN UNIV
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