Equipment for evaporating plated terbium or dysprosium on magnetic material surface

A magnetic material, magnetic material technology, applied in vacuum evaporation coating, metal material coating process, sputtering coating and other directions, can solve the problems of unenvironmental protection, product instability, etc., to improve production efficiency and improve process stability and repeatability, excellent film density and firmness

Pending Publication Date: 2019-08-16
广东腾胜科技创新有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the method of depositing rare earth film on the surface of magnetic materials is realized by coating, but the products produced by the coating process are not stable, and there are still problems such as not being environmentally friendly.

Method used

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  • Equipment for evaporating plated terbium or dysprosium on magnetic material surface
  • Equipment for evaporating plated terbium or dysprosium on magnetic material surface
  • Equipment for evaporating plated terbium or dysprosium on magnetic material surface

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Embodiment Construction

[0026] The present invention will be further described in detail below in conjunction with the drawings and specific embodiments.

[0027] In order to facilitate the unified view of the various reference signs in the drawings of the specification, the reference signs appearing in the drawings of the specification are described as follows:

[0028] 1 is a vacuum chamber, 2 is a rotary drive system, 3 is a workpiece holder, 4 is a magnetic workpiece, 5 is gaseous molecules of terbium and dysprosium, 6 is argon ion, 7 is electron beam evaporation source, 8 is ion source, 9 is For the connecting plate, 10 is a connecting disk, 11 is a workpiece disk, and 12 is a rotating shaft.

[0029] As shown in combination 1-6, the equipment for evaporating terbium or dysprosium on the surface of magnetic materials includes a vacuum chamber, a workpiece holder in the vacuum chamber, a magnetic workpiece mounted on the workpiece holder, an electron beam evaporation source in the vacuum chamber and so...

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PUM

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Abstract

The invention relates to equipment for evaporating plated terbium or dysprosium on a magnetic material surface. The equipment comprises a vacuum room, a workpiece fixing frame positioned in the vacuumroom, a magnetic material workpiece mounted on the workpiece fixing frame, an electron beam evaporating source positioned in the vacuum room and an ion source, wherein a spraying direction of the ionsource faces towards the magnetic material workpiece; a spraying direction of the electron beam evaporating source faces towards the magnetic material workpiece; the electron beam evaporating sourceand the magnetic material workpiece oppositely move or rotate; and the ion source and the magnetic material workpiece oppositely move or rotate. The equipment adopts the electron beam evaporating source to perform evaporating coating, so that under a vacuum environment, a terbium or dysprosium raw material is bombarded by an electron beam to generate heat energy for melting and volatilizing, and depositing a film on the magnetic workpiece surface. The equipment is relatively simple in structure, easily forms industrial production and application, and belongs to the technical field of terbium or dysprosium plating of the magnetic material surface.

Description

Technical field [0001] The invention relates to the technical field of terbium or dysprosium plating on the surface of a magnetic material, in particular to a device for evaporation and plating of terbium or dysprosium on the surface of a magnetic material. Background technique [0002] The current mature high-performance magnetic material manufacturing process is achieved by doping dysprosium or terbium elements and then sintering. The current plating of terbium and dysprosium rare metals is expensive, and the doping sintering method consumes a lot of rare earth metals and is expensive. A new manufacturing process is to deposit a rare earth metal film on the surface of the sintered magnetic material and then perform diffusion treatment. At present, the method of depositing the rare earth film on the surface of the magnetic material is realized by coating, but the products made by the coating process are unstable and environmentally friendly. Summary of the invention [0003] In ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/30C23C14/14C23C14/50
CPCC23C14/14C23C14/30C23C14/50C23C14/505
Inventor 朱刚毅朱刚劲朱文廓
Owner 广东腾胜科技创新有限公司
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