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Multilayer piezoelectric ceramic actuator and preparation method thereof

A piezoelectric ceramic and actuator technology, which is applied in piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc. Small problems such as avoiding internal stress, prolonging service life and increasing contact area

Pending Publication Date: 2019-07-09
SUZHOU PANT PIEZOELECTRIC TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a multilayer piezoelectric ceramic actuator to solve the technical problems in the prior art that cracks are easily generated on the edge during the preparation process of the actuator and the output of the actuator is small

Method used

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  • Multilayer piezoelectric ceramic actuator and preparation method thereof
  • Multilayer piezoelectric ceramic actuator and preparation method thereof
  • Multilayer piezoelectric ceramic actuator and preparation method thereof

Examples

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preparation example Construction

[0051] The embodiment of the second aspect of the present invention provides a method for preparing a multilayer piezoelectric ceramic actuator, such as Figure 4 to Figure 7 shown, including:

[0052] Step S101, alternately stacking piezoelectric ceramics 1 and internal electrodes 2 to form a full-electrode ceramic stack;

[0053] Step S102, sintering the full-electrode ceramic stack;

[0054] Step S104, alternately etching the edges of a plurality of internal electrodes 2;

[0055] Step S105, filling the insulating layer to the etching position of the internal electrode 2;

[0056] Step S107, sputtering the external electrodes 3 on both sides of the full-electrode ceramic stack.

[0057] Compared with the prior art, the manufacturing method of the multilayer piezoelectric ceramic actuator provided by the embodiment of the second aspect of the present invention first sinters the alternately stacked piezoelectric ceramics and internal electrodes, and during the sintering pr...

Embodiment 1

[0074] Such as Figure 7 As shown, according to the preparation method of a multilayer piezoelectric ceramic actuator provided by the present invention, comprising:

[0075] Step S101, alternately stacking piezoelectric ceramics 1 and internal electrodes 2 to form a full-electrode ceramic stack;

[0076] Step S102, sintering the full-electrode ceramic stack;

[0077] Step S104, alternately etching the edges of a plurality of internal electrodes 2;

[0078] Step S105, filling the insulating layer to the etching position of the internal electrode 2;

[0079] Step S107, sputtering the external electrodes 3 on both sides of the full-electrode ceramic stack.

[0080] Concrete preparation process is as follows:

[0081]In step S101, the piezoelectric ceramics 1 and the internal electrodes 2 are alternately stacked to form a full-electrode ceramic stack, and the multi-layer piezoelectric ceramics 1 and the internal electrodes 2 are alternately stacked along the vertical direction...

Embodiment 2

[0083] Such as Figure 8 As shown, according to the preparation method of a multilayer piezoelectric ceramic actuator provided by the present invention, comprising:

[0084] Step S1011, printing the internal electrodes 2 onto the upper or lower surface of the piezoelectric ceramic 1 to form stacked subunits;

[0085] Step S1012, stacking a plurality of stacked subunits to form an all-electrode ceramic stack;

[0086] Step S102, sintering the full-electrode ceramic stack;

[0087] Step S103, cooling the sintered all-electrode ceramic stack;

[0088] Step S104, alternately etching the edges of a plurality of internal electrodes 2;

[0089] Step S105, filling the insulating layer to the etching position of the internal electrode 2;

[0090] Step S106, grinding the outer surface of the full-electrode ceramic stack filled with the insulating layer;

[0091] Step S107, sputtering the external electrodes 3 on both sides of the full-electrode ceramic stack.

[0092] The specific...

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Abstract

The invention provides a multilayer piezoelectric ceramic actuator and a preparation method thereof, and relates to the technical field of piezoelectric ceramic components. The multilayer piezoelectric ceramic actuator provided by the invention comprises multiple layers of piezoelectric ceramics arranged at intervals in parallel, an inner electrode arranged between every two adjacent layers of thepiezoelectric ceramics, and two outer electrodes arranged on the two sides of the multiple layers of the piezoelectric ceramics respectively in the vertical direction; one ends of the inner electrodes are in contact with one outer electrode; insulating layers are arranged between the other ends of the inner electrodes and the other outer electrode; the two adjacent insulating layers in the vertical direction are arranged in a staggered mode; and in the direction perpendicular to the outer electrodes, the widths of the insulating layers range from 10 microns to 100 microns. In the preparationprocess, the edge of the multilayer piezoelectric ceramic actuator provided by the invention does not generate cracks; and in the actuator with the same cross section area, larger output can be achieved.

Description

technical field [0001] The invention relates to the technical field of piezoelectric ceramic components, in particular to a multilayer piezoelectric ceramic actuator and a preparation method thereof. Background technique [0002] Multilayer piezoelectric ceramic actuators are mainly used in: precision mechanics and mechanical engineering, life sciences, medicine and biology, pneumatic / hydraulic valves, nanopositioning / high-speed switches and active, adaptive optics and other fields. [0003] Such as figure 1 as shown, figure 1 It is a structural schematic diagram of a multilayer piezoelectric ceramic actuator in the prior art. [0004] figure 1 The multilayer piezoelectric ceramic actuator includes multiple layers of piezoelectric ceramics 1 arranged in parallel and at intervals, an internal electrode 2 is arranged between two adjacent layers of piezoelectric ceramics, and the two sides of the multilayer piezoelectric ceramics 1 are respectively provided with There is on...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/09H01L41/083H01L41/047H10N30/20H10N30/50H10N30/87
CPCH10N30/87H10N30/20H10N30/50
Inventor 丁耀民关胜
Owner SUZHOU PANT PIEZOELECTRIC TECH
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