A method and device for quickly measuring two-dimensional positioning error of a cross motion platform

A technology of cross movement and two-dimensional positioning, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of cumbersome operation, long time required, high cost, etc., and achieve the effect of simple operation and convenient and quick measurement method

Active Publication Date: 2021-09-03
深圳市大族半导体装备科技有限公司
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Problems solved by technology

[0003] The existing method of measuring the two-dimensional error of the cross motion platform is to leave a grid on the surface of flat glass or metal plate by cutting tools, laser processing, etc., and then measure the position of the intersection point of the grid to obtain the two-dimensional error of the cross motion platform at a specific position. Dimensional error, it takes a long time, the operation is more cumbersome, and the cost is higher

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  • A method and device for quickly measuring two-dimensional positioning error of a cross motion platform
  • A method and device for quickly measuring two-dimensional positioning error of a cross motion platform
  • A method and device for quickly measuring two-dimensional positioning error of a cross motion platform

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[0026] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the associated drawings. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field of the invention. The terms used herein in the description of the present invention are for the purpose of describing specific embodiments only, and are not intended to limit the present invention.

[0028] refer to figure 1 As shown, a method for quickly measuring the two-dimension...

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Abstract

The invention discloses a method and a device for rapidly measuring two-dimensional positioning errors of a cross motion platform. The measuring method first fixes the cross movement platform on the base, fixes the glass plate on the cross movement platform, and adjusts the angle of the glass plate so that the grid on the glass plate is consistent with the movement direction of the cross movement platform; the camera and The lens is also set on the base, the lens is provided with a light source, and the brightness of the light source is adjusted, and when recording the reference position of the cross motion platform, the initial deviation between the grid intersection point closest to the camera center point and the camera center point in the X direction and Y direction Shift; move the cross motion platform, and traverse all the positions that need to be measured, and record the offset of the grid intersection corresponding to each position and the camera center point in the X and Y directions; the offset of all positions will be obtained The two-dimensional positioning error of each position is obtained by subtracting the initial offset respectively. The invention is convenient and fast, simple in operation and low in cost.

Description

technical field [0001] The invention relates to the technical field of industrial automation, and more specifically, to a method and device for quickly measuring two-dimensional positioning errors of a cross motion platform. Background technique [0002] Now many industrial automation equipment will use the cross motion platform. Due to design, installation and other reasons, the actual position of the cross motion platform after moving will have a two-dimensional error with the command position (that is, the error in the X direction and the error in the Y direction). Since it will affect the processing accuracy of the workpiece placed on the cross motion platform, it is necessary to perform two-dimensional precision compensation on the positioning accuracy of the cross motion platform. Before performing two-dimensional precision compensation, it is first necessary to measure the cross motion platform Two-dimensional errors at some specific locations. [0003] The existing ...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00
Inventor 颜传祥周志伟马国东尹建刚谢文胜胡雄雄朱洪涛洪熔朱晓枫黄政吴林龙陈才伟高云峰
Owner 深圳市大族半导体装备科技有限公司
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