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Composite nano cold cathode structure with high stability electron emission and preparation method

A technology of electron emission and cold cathode, which is applied in cold cathode manufacturing, electrode system manufacturing, discharge tube/lamp manufacturing, etc. It can solve problems such as melting point limitation and electric field change, and achieve low turn-on electric field, simple structure, and high stability. The effect of electron emission

Active Publication Date: 2019-05-24
SUN YAT SEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the high-temperature heating method has a large limit on the melting point of the materials used in the electron source structure, and when the temperature drops to the normal operating temperature, the residual gas will still be adsorbed on the cold cathode
[0004] Another factor is that the surface structure will form atomic-level protrusions under a strong electric field, which will cause changes in the local electric field.

Method used

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  • Composite nano cold cathode structure with high stability electron emission and preparation method
  • Composite nano cold cathode structure with high stability electron emission and preparation method
  • Composite nano cold cathode structure with high stability electron emission and preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] Such as figure 1 As shown, the structural schematic diagrams of three composite low-dimensional nano-cold cathodes using nanowires as low-dimensional cold cathode materials on the basis of different substrates are given.

[0036] The basic structure of the cold cathode includes a substrate 1 , a low-dimensional nano cold cathode 2 , a two-dimensional film material 3 and a support structure 4 .

[0037] figure 1 In a, the substrate 1 is a planar structure, and the supporting structure is the low-dimensional nano cold cathode array itself; figure 1 In b, the substrate 1 is a planar structure, and the supporting structure is an integrated small hole in the insulating layer; figure 1 In c, the substrate 1 is a tapered structure, and the supporting structure is a separated ceramic mesh / copper mesh.

Embodiment 2

[0039] based on figure 1 Schematic diagram of the fabrication process of the composite nano-cold cathode structure.

[0040] Such as figure 2 as shown, figure 2 given in Example 1 figure 1 Fabrication flowchart of the composite nano-cold cathode structure in a. First prepare a flat substrate 1 ( figure 2 a); Then, vertical and equal-height low-dimensional nano-cold cathodes 2 are prepared on it, and multiple low-dimensional nano-cold cathodes 2 form a low-dimensional nano-cold cathode array ( figure 2 b); Finally, the two-dimensional thin film material 3 is transferred to the low-dimensional nano cold cathode 2 ( figure 2 c). The equal-height low-dimensional nano-cold cathode ensures that the geometric curvature of the tip of the two-dimensional film material is smaller than that of the tip of the nanowire.

[0041] Such as image 3 as shown, image 3 given in Example 1 figure 1 Fabrication flowchart of the composite nano-cold cathode structure in b. First prep...

Embodiment 3

[0045] Figure 5 It is the simulation result of the surface energy band bending of the compound low-dimensional nano-cold cathode whose tip curvature of the two-dimensional thin film material is larger / smaller than that of the low-dimensional nanostructure tip.

[0046] Such as Figure 5 a and Figure 5 As shown in b, the schematic diagrams of the structures in which the geometric curvature of the tip of the two-dimensional thin film material is greater than and smaller than that of the nanowire tip are respectively listed. According to geometry, Figure 5 The 2D thin film material in b is in close contact with the nanowire tip at the tip, while Figure 5 The two-dimensional thin film material in a forms a suspended structure at the tip.

[0047] Figure 6 It is the simulation result of the surface energy band bending of single-layer tungsten diselenide films with different thicknesses under the applied electric field of 2.5 V / nm; Band bending under nm electric field. i...

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Abstract

The invention discloses a composite nano cold cathode structure with high stability electron emission and a preparation method. The composite nano cold cathode structure comprises a substrate, a low-dimensional nano cold cathode vertically prepared on the substrate, a two-dimensional thin film material covering the tip of the low-dimensional nano cold cathode and a support structure used for regulating the geometric curvature of the tip of the two-dimensional thin film material. The structure has the advantage that a clean emission surface is obtained by using the surface without a dangling bond structure of the two-dimensional thin film material. In addition, the transport process of emitted electrons can be controlled through regulating the geometric curvature of the tip of the two-dimensional thin film material, thereby enabling the emitted electrons to become hot electrons with high energy, and thus having a lower turn-on electric field. The cleaner surface and the lower surface barrier enable the composite low-dimensional nano cold cathode to achieve high stability electron emission.

Description

technical field [0001] The invention relates to the technical field of vacuum microelectronics. In particular, the invention relates to a composite nanometer cold cathode structure with high stable electron emission, and further relates to a preparation method of the composite nanometer cold cathode with high stable electron emission. Background technique [0002] Cold cathode electron sources have the advantages of high brightness, good coherence, and easy integration, so they have important applications in high-precision electron microscopes, flat-panel X-ray sources, flat-panel displays, and parallel electron beam etching. However, the inherent instability of the emission current of cold cathodes limits its development. [0003] In general, the instability of cold cathodes is mainly related to two aspects. One is the surface adsorption-desorption process, which is mainly related to surface dangling bonds and surface charges. At present, the method of heating the cold c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J1/304H01J9/02
Inventor 陈军陈毅聪佘峻聪邓少芝许宁生
Owner SUN YAT SEN UNIV
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