System for precisely measuring fine dust precursors
A precursor and material technology, which can be used in measurement devices, color/spectral property measurement, material analysis by optical means, etc., and can solve problems such as large constraints.
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[0034]Hereinafter, description will be made with reference to the accompanying drawings of embodiments of the invention of the present application, but this is for easier understanding of the invention of the application, not to limit the scope of the invention of the application.
[0035] TDLAS is a metrology system using a tunable diode laser (Tunable Diode Laser), and has recently attracted attention as a real-time metrology system. figure 2 It is a typical configuration related to TDLAS, and the technical matters of TDLAS itself are described in Patent Documents 5, 6, and 7, and a detailed description thereof is omitted here.
[0036] The precision metering device for the concentration of the dust precursor substance includes: a laser part, which irradiates a laser beam; a measurement unit, which collects the gas for measurement and passes through the laser beam; a light detection part, which gathers the laser beam passing through the measurement unit; a processing part ,...
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