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Aluminum rotary target material and manufacturing method thereof

A manufacturing method and technology of rotating target, which are applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problems of high production cost of rotating target material and low utilization rate of aluminum target, and achieve easy scale The effect of chemical production, high yield, and uniform grain refinement

Inactive Publication Date: 2019-05-03
广州市尤特新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The utilization rate of existing aluminum targets in the coating process is not high, resulting in high production costs for rotating targets

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Manufacturing average particle size D 50 = 20μm aluminum powder, prepare 304 stainless steel tube as the target base tube, the length of the tube is 850mm, the inner diameter is 125mm, and the outer diameter is 133mm, the surface of the 304 stainless steel tube is treated to remove dirt and oxide layer, and then sandblasting, sandblasting and roughening The surface roughness of the finished substrate tube is 180-220μm; put the manufactured aluminum powder into the cold spray powder feeder, and install the processed substrate tube on the transmission device, the speed is 120r / min, and the moving speed of the spray gun is 12mm / s ; The main air pressure of cold spraying is 4Mpa, the powder feeding air pressure is 4.1Mpa, the main air heating temperature is 300°C, and the spraying distance is 35mm. The obtained target has a thickness of 10mm, a density of 95%, and an oxygen content of <1500ppm. Finally, the target is machined into the required size and precision to obtain t...

Embodiment 2

[0026] Manufacturing average particle size D 50 = 40μm aluminum powder, prepare 304 stainless steel tube as the target base tube, the length of the tube is 850mm, the inner diameter is 125mm, and the outer diameter is 133mm, the surface of the 304 stainless steel tube is treated to remove dirt and oxide layer, and then sandblasting, sandblasting and roughening The surface roughness of the final substrate tube is 180-220μm; put the manufactured aluminum powder into the cold spray powder feeder, and install the prepared substrate tube on the transmission device with a rotation speed of 120r / min and a spray gun moving speed of 12mm / s ; The main air pressure of cold spraying is 5Mpa, the powder feeding air pressure is 5.1Mpa, the main air heating temperature is 450℃, and the spraying distance is 30mm. The obtained target material has a thickness of 15mm, a density of 98%, and an oxygen content of <1200ppm. The target material is machined to the required size and precision to obta...

Embodiment 3

[0028] Manufacturing average particle size D 50 = 40μm aluminum powder, prepare a titanium tube as the target substrate tube, the tube length is 850mm, the inner diameter is 125mm, and the outer diameter is 133mm, the surface of the tube is treated to remove dirt and oxide layer, and then sandblasting, the surface of the substrate tube after sandblasting roughening is rough The density is 180-220μm; put the manufactured aluminum powder into the cold spray powder feeder, and install the prepared substrate tube on the transmission equipment, the speed is 150r / min, and the moving speed of the spray gun is 15mm / s; the main air pressure of cold spray 4.5Mpa, powder feeding air pressure 4.6Mpa, main air heating temperature 550°C, spraying distance 35mm. The obtained target has a thickness of 10mm, a density of 97.1%, and an oxygen content of <1500ppm. The target material is machined to the required size and precision to obtain the finished product.

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PUM

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Abstract

The invention provides a manufacturing method of an aluminum rotary target material. The method comprises S1, aluminum powder with the average grain diameter D50 of 10-80 micron is manufactured; S2, astainless steel tube or a titanium tube is taken as a target material base tube, and surface sand blasting treatment is conducted on the target material base tube; S3, cold spraying and forming are conducted, the manufactured aluminum powder is loaded into a cold spraying powder feeder, the processed target material base tube is installed on a transmission device to enable the target material base tube to rotate, a cold spraying gun and the target material base tube do relative motion in the horizontal direction to prepare the target material; and S4, the sprayed target material is machined into that with required size and precision, and a finished product is prepared. According to the method, the manufacturing process of the aluminum rotary target material is simple, the density of the manufactured aluminum rotary target material is far higher than that of a traditional thermal spraying technology, the relative density can reach 95-99%, the oxygen content is lower than that of the traditional thermal spraying technology, grain tissues are uniformly refined, the yield is high, the powder utilization rate is high and large-scale production is facilitated.

Description

technical field [0001] The invention relates to a rotating target material, in particular to an aluminum rotating target material, and also relates to a manufacturing method of the aluminum rotating target material. Background technique [0002] Due to the rapid development of optical glass, touch screen and other industries, the demand for aluminum rotating targets is increasing, and the quality requirements for aluminum rotating targets are also getting higher and higher. The utilization rate of existing aluminum targets in the coating process is not high, resulting in high production costs for rotating targets. Contents of the invention [0003] In view of this, the object of the present invention is to provide an aluminum rotary target and a manufacturing method thereof. The quality of the aluminum rotary target produced by the method is good, the utilization rate of the target in the coating process is high, and the production cost of the rotary target is greatly red...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/14C23C14/32C23C14/34
Inventor 周志宏肖世洪雷雨肖世文沈艳斌周昭寅
Owner 广州市尤特新材料有限公司
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