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Pressure sensitive thin film, sensor, sensor array and corresponding preparation methods of pressure sensitive thin film, sensor and sensor array

A pressure sensor and sensitive film technology, applied in the field of pressure sensitive films, sensor arrays and their respective preparations, and pressure sensors, can solve the problems of easy deformation of microstructures and increase costs, reduce deformation recovery time, eliminate process steps, reduce The effect of process complexity

Active Publication Date: 2019-04-23
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, this method has the following disadvantages: (1) the use of templates increases the cost of the process; (2) the microstructure formed on the surface of the film is extremely easy to deform, and can only have high sensitivity in a small pressure range

Method used

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  • Pressure sensitive thin film, sensor, sensor array and corresponding preparation methods of pressure sensitive thin film, sensor and sensor array
  • Pressure sensitive thin film, sensor, sensor array and corresponding preparation methods of pressure sensitive thin film, sensor and sensor array
  • Pressure sensitive thin film, sensor, sensor array and corresponding preparation methods of pressure sensitive thin film, sensor and sensor array

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preparation example Construction

[0065] A specific embodiment of the present invention also provides a method for preparing the above-mentioned pressure sensor array, including:

[0066] A first base plate and a second base plate are provided, the first base plate has a first substrate, the surface of the first substrate is formed with a plurality of upper electrode lines arranged in parallel, and the second base plate has a second substrate , the surface of the second substrate is formed with a plurality of lower electrode lines arranged in parallel. The upper electrode lines are of the same size and spacing, and the lower electrode lines are of the same size and spacing.

[0067] Support bars are formed on the outer edges of the upper electrode line and the lower electrode line at the edge of the sensor array area, and support bars are formed on both sides of the opposite width of the other electrode line. The support bar is located at the edge of the array area, which is convenient for subsequent removal ...

Embodiment 1

[0072] The pressure sensor is completed through the following specific steps:

[0073] (1) Utilize ethanol solution, acetone solution and deionized water ethylene terephthalate (PET) substrate to carry out ultrasonic cleaning, dry after cleaning, adopt oxygen plasma or ultraviolet light / ozone to process substrate surface; (2 ) preparing an aluminum electrode on the substrate by vacuum evaporation;

[0074] (3) Prepare two bottom plates with the same size and flat surface, attach the substrates of the prepared electrodes to the surface of the bottom plate respectively, and paste glass support strips with a height of 1.1 mm on both sides of the electrodes;

[0075] (4) Weigh the prepolymer of polydimethylsiloxane, weigh the foaming material according to the prepolymer mass ratio of polydimethylsiloxane to 10:2 and mix evenly, The prepolymer mass ratio of polysiloxane is 10:1, and the dimethylsiloxane curing agent is weighed and mixed uniformly;

[0076] (5) Pour the mixed mate...

Embodiment 2

[0081] The pressure sensor is completed through the following specific steps:

[0082] (1) Utilize ethanol solution, acetone solution and deionized water ethylene terephthalate (PET) substrate to carry out ultrasonic cleaning, dry after cleaning, adopt oxygen plasma or ultraviolet light / ozone to process substrate surface; (2 ) preparing an indium tin oxide electrode on the substrate by magnetron sputtering;

[0083] (3) Prepare two bottom plates with the same size and flat surface, attach the substrates of the prepared electrodes to the surface of the bottom plate respectively, and paste glass support strips with a height of 1.1 mm on both sides of the electrodes;

[0084] (4) Weigh the polydimethylsiloxane prepolymer, weigh the foaming material according to the mass ratio of the polydimethylsiloxane prepolymer to 10:2 and mix evenly, press the polydimethylsiloxane prepolymer The mass ratio of siloxane prepolymer is 10:1 to take by weighing dimethyl siloxane curing agent and ...

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Abstract

The invention relates to a pressure sensitive thin film, a sensor, a sensor array and corresponding preparation methods of the pressure sensitive thin film, the sensor and the sensor array. Two or more closed holes with two different sizes are formed in the pressure sensitive thin film, the closed holes are internally provided with gas, and the sizes of the closed holes gradually increase upwardsfrom the bottom of the pressure sensitive thin film in the direction perpendicular to the thickness of the pressure sensitive thin film. The sensitivity of the pressure sensitive thin film is improved.

Description

technical field [0001] The invention relates to the technical field of pressure sensors, in particular to a pressure sensitive film, a pressure sensor, a sensor array and their respective preparation methods. Background technique [0002] In recent years, with the rapid development of wearable products, flexible sensor components have become one of the hot topics explored by researchers. Among them, flexible pressure sensors have received extensive attention, and have very broad market prospects in fields including artificial electronic skin, flexible touch screens, intelligent robots, and medical health. [0003] At present, research on flexible pressure sensors can be based on a variety of working principles, mainly including capacitive, resistive, piezoelectric and thin film transistor. As an important component of wearable devices, pressure sensors have high requirements: including bendability, stretchability, high sensitivity, fast response, and compatibility with the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/14
CPCG01D5/14
Inventor 郭小军陈苏杰彭赛黄钰坤
Owner SHANGHAI JIAO TONG UNIV
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