Solar battery piece diffusion process

Abstract

The invention discloses a solar battery piece diffusion process. The solar battery piece diffusion process comprises the following steps of B, heating a furnace chamber of a diffusion furnace to a first temperature, and continuously introducing pure nitrogen; C, maintaining the furnace chamber at the first temperature, and introducing pure nitrogen and oxygen to the furnace chamber to oxidize thebattery piece; D, carrying out low-temperature diffusion at the first temperature, and continuously introducing pure nitrogen, phosphorus source-carrying nitrogen and oxygen into the furnace chamber in the process; E, heating the furnace chamber of the diffusion furnace to a second temperature, simultaneously pumping phosphorus atoms, and continuously introducing pure nitrogen; F, maintaining thefurnace chamber at the second temperature and carrying out high-temperature diffusion, and continuously introducing pure nitrogen, phosphorus source-carrying nitrogen and oxygen into the furnace chamber in the process; G, heating the furnace chamber of the diffusion furnace to a third temperature, and simultaneously pumping the phosphorus atoms, and continuously introducing pure nitrogen; H, continuously pumping the phosphorus atoms at the third temperature, and continuously introducing pure nitrogen and oxygen into the furnace chamber in the process; and I, performing cooling and carrying outoxidation and simultaneously pumping the phosphorus atoms, and continuously introducing pure nitrogen and oxygen into the furnace chamber in the process.

Description

technical field [0001] The invention relates to a process for making a PN junction by diffusing a solar battery sheet. Background technique [0002] A solar cell, also known as a photovoltaic cell, is a semiconductor device that converts the sun's light energy directly into electrical energy. Because it is a green product, does not cause environmental pollution, and is a renewable resource, solar cells are a new energy source with broad development prospects in today's energy shortage situation. [0003] Diffusion is an important process in the production process of crystalline silicon solar cells. The traditional diffusion process uniformly dopes the surface of crystalline silicon solar cells. High, but the high impurity concentration on the surface leads to band shrinkage in the diffusion region, lattice distortion, increased defects, obvious "dead layer", and poor short-wave response of the battery; in order to obtain high-efficiency crystalline silicon solar cells with ...

AI Technical Summary

Problems solved by technology

[0003] Diffusion is an important process in the production process of crystalline silicon solar cells. The traditional diffusion process uniformly dopes the surface of crystalline silicon solar cells. High, but the high impurity concentration on the surface leads to band shrinkage in the diffusion region, lattice distortion, increased defects, obvious "dead layer", poor short-wave response of the battery; in order to obtain high-efficiency crystalline silicon solar cells with good short-wave response, the crystalline silicon wafer Diffusion develops in the direction of high square resistance

The current diffusion method for crystalline silicon solar cells is as follows: place the crystalline silicon wafer in a horizontal diffusion furnace cavity, and pass in a mixed gas, which is composed of nitrogen and phosphorus oxychloride in proportion, and is in a state of normal pressure. Diffusion of crystalline silicon wafers, the uniformity of the surface sheet resistance in the crystalline silicon wafers obtained after diffusion processing is poor, and when high surface sheet resistance is produced, it is easy to cause low-efficiency crystalline silicon solar cells in the subsequent production process

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