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Planetary wheel for holding workpiece for double-side grinding device

A technology for grinding objects and grinding devices, applied in grinding/polishing equipment, work carrier, metal processing equipment, etc., can solve the problem of insufficient homogenization of the supply of grinding fluid, and achieve excellent flatness, equal supply, Evenly distributed effect

Active Publication Date: 2021-02-23
SPEEDFAM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0014] However, in these methods, the supply (wrap-in) of the polishing liquid to the back surface (lower fixed plate side) of the object to be polished is not necessarily sufficient, and the uniformity of the supply amount of the polishing liquid to the upper and lower fixed plates is not sufficient.

Method used

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  • Planetary wheel for holding workpiece for double-side grinding device
  • Planetary wheel for holding workpiece for double-side grinding device
  • Planetary wheel for holding workpiece for double-side grinding device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] ready to have with figure 1 The star wheel for holding the object to be ground has the same shape as the star wheel for holding the object to be ground shown. The material of the prepared planetary object holding planet was stainless steel, and its thickness was set to 774 μm. In this planetary object holding planetary gear, a resin frame made of aramid resin is provided on the inner peripheral portion of the object holding hole in order to prevent damage to the outer edge portion of the object to be polished.

[0044] A polishing test of a silicon wafer having a diameter of 300 mm was performed using the above-mentioned pinion wheel for holding a workpiece to be polished. The grinding machine and grinding processing conditions are as follows.

[0045] Grinding machine: double-sided grinding device manufactured by SpeedFam Co., Ltd.

[0046] Abrasive cloth: MH (registered trademark) series manufactured by Nittahaas Corporation

[0047] Abrasive: GLANZOX (registered ...

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PUM

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Abstract

The present invention provides a planetary gear for holding objects to be ground. The planetary wheel for holding objects to be ground is a planetary wheel for holding objects to be ground for a double-sided grinding machine, and is used to obtain precise upper and lower surface roughness, and Grinding object with excellent parallelism and excellent flatness. The problem is solved by using the following planet wheel for holding the object to be ground, which has one or more holding holes for holding the object to be ground. A plurality of small holes are perforated on the base material of the planetary wheel on the inner side of the concentric circle, and a plurality of small holes having a diameter larger than the aforementioned small holes are perforated on the base material of the planetary wheel on the outer side than the aforementioned imaginary concentric circle. The concentric circles have the same center as the holding hole for holding the object to be ground, and are drawn with a radius larger than that of the holding hole.

Description

technical field [0001] The present invention relates to a planetary wheel for holding objects to be ground. The planetary wheel for holding objects to be ground is used in a double-sided grinding device, and the double-sided grinding device clamps and press-connects the objects to be ground to the top and bottom of the grinding cloth pasted on one side. Between the fixed plates, at least one of the upper and lower fixed plates and the object to be ground is rotated to simultaneously grind and process both sides of the object to be ground. Small holes for abrasives to pass through are provided around. Background technique [0002] The object to be polished is held during the double-sided grinding process of the object to be polished consisting of silicon wafers, compound semiconductor wafers, aluminum magnetic hard disk substrates, glass magnetic hard disk substrates, photomask glass, crystal resonators, ceramics, etc. In the holding hole of the planet wheel for holding the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/28B24B57/02
CPCB24B37/28B24B57/02
Inventor 田中敬杉山将贵
Owner SPEEDFAM CO LTD
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