Multi-frequency heterodyne phase unwrapping error compensation method
A phase unwrapping and error compensation technology, applied in measurement devices, instruments, and optical devices, etc., can solve the problems of absolute phase map jumping, the large influence of shooting environment and light intensity, etc., and achieve the elimination of jumping points and phase unwrapping. The effect of continuous graph and high stability
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[0032] In order to make the objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0033] In order to better understand the error compensation method of the multi-frequency heterodyne phase unwrapping of the present invention, the classic phase measurement profilometry (PMP) will be described below first.
[0034] When using phase measurement profilometry (PMP) to calculate the absolute phase of the measured object, we use the grating fringe pattern with four phase shifts at three frequencies to calculate the main phase of the grating fringe pattern or the deformed grating fringe pattern. Value and absolute phase after phase unwrapping. In the experiment we used The grating stripes of three frequencies and 0, π, Phase dephasing is carried out by four phase shifts, and the whole process of dephasing (phase unwrapping)...
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